High coupling materials for thin film bulk acoustic wave resonators
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New micromachined pressure sensors based on PZT coated silicon cantilevers have been fabricated and integrated in a photoacoustic gas detector. PZT Sol-gel thin films texture and composition were optimized with respect to the transverse piezoelectric coeff ...
Using a serial bilayer model we show that heterogeneous ferroelectric systems may exhibit substantial Maxwell-Wagner piezoelectric relaxation. The relaxation has its origin in the coupling of the dielectric and piezoelectric properties. The model predicts ...
The macroscopic properties of ferroelectric materials depend directly on the domain configuration and the structure of the domain boundaries. For this reason, their study is of great scientific and technological interest. Several models have been developed ...
Selective modification of zirconium alkoxide by acetic acid or acetylacetone was used in solution processing of PZT Pb(Zr,Ti)O-3 thin films by 2-methoxyethanol route. EXAFS results clearly show a decrease of Zr-O-Zr links in the acetic acid modified PZT so ...
Strontium Bismuth Titanate is a very promising material for high temperature piezoelectric applications, its elevated ferroelectric phase transition (530°C), linear piezoelectric properties under low field and relatively low room temperature conductivity ( ...
Thickness mode resonances in commercial piezoelectric ceramics have been characterised as a function of frequency by two methods. The first is based on a fit on the electrical impedance for the fundamental and the overtones. This method has been applied to ...
This paper reviews deposition, integration. and device fabrication of ferroelectric PbZrxTi1-xO3 (PZT) films for applications in microelectromechanical systems. As examples, a piezoelectric ultrasonic micromotor and pyroelectric infrared detector array are ...
Pb(Zr, Ti)O-3 (PZT) and Pb(Zr, Ti, Nb)O-3 (PNZT) thin films have been deposited on platinized silicon substrates by sputtering followed by a postannealing treatment. The Nb concentration in the films varied between 1 and 7 at. % with increments of 1 at. %. ...
This paper reviews deposition, integration, and device fabrication of PbZrxTi1-xO3 (PZT) films for applications in micro-electromechanical systems. An ultrasonic micromotor is described as an example. A summary of the published data on piezoelectric proper ...
The effective piezoelectric coefficient e(31) has been measured on sol-gel processed Pb(ZrxTi1-x)O-3 thin films with Zr concentrations ranging from 45 to 60%. The largest value was observed at 45% Zr, although dielectric constant and effective d(33) peak a ...
