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Mechanically tuneable microoptical structure based on PDMS

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Optical Modulators Based on Microfabricated Tilting Flaps Operating at low Actuation Voltages

Fabio Jutzi

In this thesis the concept, modelling, design, fabrication process and characterization of novel optical modulators are presented. The devices consist of flaps exhibiting a large tilt with electrostatic actuation at low voltages. The applications comprise, ...

EPFL2012

Microfrabricated Mirrors For Space Applications

Nico de Rooij, Caglar Ataman, Wilfried Noell, Sébastien Lani, Dara Zaman Bayat, Benedikt Guldimann

We report on the advances towards the design and fabrication of a system consisting or two 10mm mirrors, one actuated magnetically and the other electrostatically. The system will be used for beam steering. The maximum resonant frequencies and deflection a ...

Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2011

Multilayer Dielectric Elastomer Actuators with Ion Implanted Electrodes

Herbert Shea, Muhamed Niklaus, Samin Akbari

We present the design, fabrication process and characterization of multilayer miniaturized polydimethylsiloxane (PDMS)-based dielectric elastomer diaphragm actuators. The conductive stretchable electrodes are obtained by lowenergy metal ion implantation. T ...

Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2011

MEMS-based programmable reflective slit mask for multi-object spectroscopy

Nico de Rooij, Michael David Canonica, Wilfried Noell

Multi-object spectroscopy is a powerful tool for space and ground-based telescopes for the study of the formation of galaxies. This technique requires a programmable slit mask for astronomical object selection. We are developing MEMS-based programmable ref ...

Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2011

Large Hybrid High Precision MEMS Mirrors

Dara Zaman Bayat

This thesis presents the design and microfabrication technology of a tip-tilt, 2 degree of freedom "mirror system" made out of Silicon On Insulator (SOI) wafers with two movable mirrors that have diameter of 10 mm. The system was intended for precise beam ...

EPFL2011

Mechanically tuneable microoptical structure based on PDMS

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Victor Javier Cadarso Busto

A system of two solid microlenses with uncoupled optical properties is presented. This structure has been designed in order to have one lens as a reference, while the other one can be mechanically tuneable. The reference lens presents a diameter of 2 mu m ...

Elsevier2010

Reliable MEMS Actuators for Driving Large Microsystems

Nicolas Bernard Golay

Nowadays many consumer electronic devices are using small engines (micromotors). Thanks to technological innovation, the components can be imbedded into numerous portable systems. The key factors for a nomadic integration are: reduction of power consumptio ...

EPFL2010

Projeter ensemble. Une nouvelle patinoire à Lausanne.

Rainer Epp, Florent Rouvenaz

Le projet est issu d'une étroite collaboration entre deux futures architectes et un étudiant en génie civil. Cette approche interdisciplinaire répond à la nécessité grandissante de coopération entre architectes et ingénieurs dans le développement de projet ...

2010

Micromirrors for integrated tunable mid-infrared detectors and emitters

Niels Quack

The mid-infrared range is of interest in spectroscopic applications, due to the large number of organic compounds that exhibit characteristic absorption bands in this spectral region. Semiconductor technology, however, has been developed mainly for the nea ...

ETH2009

Tunable plasmonic nanostructures

Olivier Martin, Holger Fischer

We discuss different composite plasmonic nanostructures, which optical properties can be tuned by displacing some of their parts at the nanoscale. The actuation of these structures with MEMs will define new optical functionalities. ...

Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa2008