Publication

Digital holographic microscopy for micro-systems investigation in near infrared

Christian Depeursinge, Yves Delacrétaz
2009
Conference paper

Abstract

We have demonstrated the suitability of digital holographic microscopy (DHM) with near infra-red illumination for micro-optical elements and silicon micro-systems characterization, opening a wide field of quality control applications.

Official source

https://infoscience.epfl.ch/record/147242?ln=en

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Digital holographic microscopy for micro-systems investigation in near infrared

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