Implementation and characterization of a quartz tuning fork based probe consisted of discrete resonators for dynamic mode atomic force microscopy
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This thesis deals with the development of microfabrication technologies based on photoplastic structuring by lithographic and molding techniques. These technologies, combined with an original releasing method, allow for the simple fabrication of pseudo thr ...
We demonstrate high resolution imaging with microfabricated, cantilevered probes, consisting of solid quartz tips on silicon levers. The tips are covered by a 60-nm thick layer of aluminium, which appears to be closed at the apex when investigated by trans ...
The inexpensive fabrication of high-quality probes for nearfield optical applications is still unsolved although several methods for integrated fabrication have been proposed in the past. A further drawback is the intensity loss of the transmitted light in ...
We report on the first successful operation of a scanning force microscope using microfabricated capacitive force sensors. The sensors, which are made from single crystal silicon on insulator wafers, consist of a cantilever spring with integrated tip at th ...
Combining the subwavelength resolution of near-field interactions with the optical contrast mechanisms of classical optical microscopy makes scanning near-field optical microscopy an interesting technique for many applications. In spite of more than ten ye ...
A simple method has been developed for the prodn. of Au surfaces which are uniformly flat over large areas. Si wafers serve as substrates for the evapn. of thin Au layers. A glass slide glued onto the Au film allows successful sepn. of the Au layer from th ...
The dynamic mode atomic force microscopy based on a microfabricated cantilever and a commercial quartz tuning fork was probed. The probe was self-sensing and self-actuating. The tuning fork performed the function of a force sensor. The amplitude and freque ...
We performed lateral force microscopy on thiolipid Langmuir-Blodgett (LB) films physisorbed on mica substrates with a silicon tip of an at. force microscope. The structure of condensed domains, reflecting their sym. morphol., was obsd. The lateral (frictio ...
Scanning capacitance microscopy and electrostatic force microscopy have been used to characterize commercial semiconductor devices at various stages of the fabrication process. These methods, combined with conventional atomic force microscopy, allow to vis ...
A monocrystalline silicon lever with an integrated silicon tip for a Force/Friction Microscope was realized. Theoretical studies have been carried out to find the shape and dimensioning according to the mechanical system requirements. Moreover, sharp tips ...