Publications related to Fabrication of nanopore arrays and ultrathin silicon nitride membranes by block-copolymer-assisted lithography

Impact of oxygen content in powders on the morphology of the laser molten tracks in preparation for additive manufacturing of silicon

Patrik Willi Hoffmann, Lucas Güniat, Marc Leparoux

Powder additive pulsed Nd:YAG laser (wavelength 1064 nm), with the aim of preparing AM of such material. The influence of oxygen content in the initial silicon powders on the continuous tracks morphology was investigated. It was found that the initial oxyg ...

ELSEVIER2020

Monolithic Fabrication of Silicon Nanowires Bridging Thick Silicon Structures

Davide Sacchetto, Yusuf Leblebici, Oliver Peric, Zuhal Tasdemir

A monolithic process is developed for the fabrication of Si nanowires within thick Si substrates. A combination of anisotropic etch and sidewall passivation is utilized to protect and release Si lines during the subsequent deep etch. An etch depth of 10 mu ...

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC2018

Control of the interaction strength of photonic molecules by nanometer precise 3D fabrication

Jürgen Brugger, Yuliya Lisunova

Applications for high resolution 3D profiles, so-called grayscale lithography, exist in diverse fields such as optics, nanofluidics and tribology. All of them require the fabrication of patterns with reliable absolute patterning depth independent of the su ...

Nature Publishing Group2017

Femtosecond laser assisted 3-dimensional freeform fabrication of metal microstructures in fused silica

Andreas Mortensen, Yves Bellouard, Raphaël Charvet, Fatmah Ebrahim, Cyril Dénéréaz

Femtosecond laser exposure of fused silica combined with chemical etching has opened up new opportunities for three-dimensional freeform processing of micro-structures that can form complex micro-devices of silica, integrating optical, mechanical and/or fl ...

Spie-Int Soc Optical Engineering2017

Release area confinement in Contour Mode Resonators

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Andrea Lozzi

In this paper we propose a modified fabrication process to finely define the region surrounding the resonator that undergoes Si etching in CMRs. The unpredictable undercut has been shown to lead to Q instability within microns' variation. High aspect ratio ...

Ieee2017

A Deep Etching Mechanism for Trench-Bridging Silicon Nanowires

Yusuf Leblebici, Zuhal Tasdemir

Introducing a single silicon nanowire with a known orientation and dimensions to a specific layout location constitutes a major challenge. The challenge becomes even more formidable, if one chooses to realize the task in a monolithic fashion with an extrem ...

Institute of Physics2016

Parylene-Based Hollow Nanomechanical Resonators For Bioapplications

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Tom Larsen, Antoine Nicolas Désiré Aupée

We present the fabrication of parylene-based hollow nanomechanical resonators, following a simple two step fabrication process with a thermal budget of less than 120°C. This process is ideal for fast prototyping and compatible with most materials used in m ...

2016

Suspended micro-resonator fabrication: fusion bonding of Silicon Nitride interfaces

Annalisa De Pastina, Pierre-Emmanuel Marie Thiriet

This project aims to prove of the feasibility of Silicon Fusion Bonding for fabrication of micro- capillaries for gas cooling down. An optimal recipe for Silicon Fusion Bonding is developed, consisting of four steps: RCA cleaning, surface activation with O ...

2016

Chat with Graph Search

Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.

DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.

Fabrication of nanopore arrays and ultrathin silicon nitride membranes by block-copolymer-assisted lithography

Impact of oxygen content in powders on the morphology of the laser molten tracks in preparation for additive manufacturing of silicon

Fabrication and Characterization of Freestanding Single Crystal Diamond and Silicon Microresonators

Photonic Damascene process for integrated high Q microresonator based nonlinear photonic devices

Monolithic Fabrication of Silicon Nanowires Bridging Thick Silicon Structures

Control of the interaction strength of photonic molecules by nanometer precise 3D fabrication

Femtosecond laser assisted 3-dimensional freeform fabrication of metal microstructures in fused silica

Release area confinement in Contour Mode Resonators

A Deep Etching Mechanism for Trench-Bridging Silicon Nanowires

Parylene-Based Hollow Nanomechanical Resonators For Bioapplications

Suspended micro-resonator fabrication: fusion bonding of Silicon Nitride interfaces

Graph Chatbot

Chat with Graph Search

Suspended micro-resonator fabrication: fusion bonding of Silicon Nitride interfaces

Parylene-Based Hollow Nanomechanical Resonators For Bioapplications

A Deep Etching Mechanism for Trench-Bridging Silicon Nanowires

Release area confinement in Contour Mode Resonators

Femtosecond laser assisted 3-dimensional freeform fabrication of metal microstructures in fused silica

Control of the interaction strength of photonic molecules by nanometer precise 3D fabrication

Monolithic Fabrication of Silicon Nanowires Bridging Thick Silicon Structures

Photonic Damascene process for integrated high Q microresonator based nonlinear photonic devices

Fabrication and Characterization of Freestanding Single Crystal Diamond and Silicon Microresonators

Impact of oxygen content in powders on the morphology of the laser molten tracks in preparation for additive manufacturing of silicon