WC/a-C nanocomposite thin films: Optical and electrical properties

WC/amorphous carbon (a-C) thin films were deposited by dual magnetron sputtering from individual WC and graphite targets. The influence of film composition and microstructure on the optical and electrical properties was investigated. As evidenced by x-ray photoelectron spectroscopy and grazing angle x-ray diffraction measurements, the WC/a-C films are composite materials made of hexagonal W2C and/or cubic beta-WC1-X nanocrystallites embedded in (a-C) matrix. The optical properties were studied by spectroscopic ellipsometry and the electrical resistivity was measured by the van der Pauw method between 20 and 300 K. Both the optical and the electrical properties of the WC/a-C films are correlated with the chemical composition and microstructure evolution caused by a-C addition. The optical properties of W2C/a-C and beta-WC1-x/a-C films with a-C content