Fast in situ metallization: a comparison of several methods with possible applications in high-density multichip interconnects
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Measurements of anions and cations are reported for hydrocarbon and silane radio frequency capacitive glow discharges. Series of anions were observed by quadrupole mass spectrometry using power-modulated plasmas, and their structures are interpreted from t ...
A compound, in metal-free or metal complex form of formula (1) to (3) in which R is hydrogen or C1-30 alkyl; X is hydrogen, halogen (preferably Cl or Br) or C1-30 alkyl. ...
(Ecole Polytechnique Federale de Lausanne (epfl), Switz.).1995
It is now generally recognized that the excitation frequency is an important parameter in radio-frequency (rf) plasma-assisted deposition. Very-high-frequency (VHF) silane plasmas (50-100 MHz) have been shown to produce high quality amorphous silicon films ...
