MEMSMEMS (Microelectromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in arrays (e.g., digital micromirror devices) can be more than 1000 mm2.
MicrofabricationMicrofabrication is the process of fabricating miniature structures of micrometre scales and smaller. Historically, the earliest microfabrication processes were used for integrated circuit fabrication, also known as "semiconductor manufacturing" or "semiconductor device fabrication". In the last two decades microelectromechanical systems (MEMS), microsystems (European usage), micromachines (Japanese terminology) and their subfields, microfluidics/lab-on-a-chip, optical MEMS (also called MOEMS), RF MEMS, PowerMEMS, BioMEMS and their extension into nanoscale (for example NEMS, for nano electro mechanical systems) have re-used, adapted or extended microfabrication methods.
Vertical positionVertical position or vertical location is a position along a vertical direction above or below a given vertical datum (reference level). Vertical distance or vertical separation is the distance between two vertical positions. Many vertical coordinates exist for expressing vertical position: depth, height, altitude, elevation, etc. Points lying on an equigeopotential surface are said to be on the same vertical level, as in a water level.
Vertical datumIn geodesy, surveying, hydrography and navigation, vertical datum or altimetric datum, is a reference coordinate surface used for vertical positions, such as the elevations of Earth-bound features (terrain, bathymetry, water level, and built structures) and altitudes of satellite orbits and in aviation. In planetary science, vertical datums are also known as zero-elevation surface or zero-level reference.
Position of the SunThe position of the Sun in the sky is a function of both the time and the geographic location of observation on Earth's surface. As Earth orbits the Sun over the course of a year, the Sun appears to move with respect to the fixed stars on the celestial sphere, along a circular path called the ecliptic. Earth's rotation about its axis causes diurnal motion, so that the Sun appears to move across the sky in a Sun path that depends on the observer's geographic latitude.
Etching (microfabrication)Etching is used in microfabrication to chemically remove layers from the surface of a wafer during manufacturing. Etching is a critically important process module, and every wafer undergoes many etching steps before it is complete. For many etch steps, part of the wafer is protected from the etchant by a "masking" material which resists etching. In some cases, the masking material is a photoresist which has been patterned using photolithography. Other situations require a more durable mask, such as silicon nitride.
ActuatorAn actuator is a component of a machine that is responsible for moving and controlling a mechanism or system, for example by opening a valve. In simple terms, it is a "mover". An actuator requires a control device (controlled by control signal) and a source of energy. The control signal is relatively low energy and may be electric voltage or current, pneumatic, or hydraulic fluid pressure, or even human power. Its main energy source may be an electric current, hydraulic pressure, or pneumatic pressure.
Linear actuatorA linear actuator is an actuator that creates motion in a straight line, in contrast to the circular motion of a conventional electric motor. Linear actuators are used in machine tools and industrial machinery, in computer peripherals such as disk drives and printers, in valves and dampers, and in many other places where linear motion is required. Hydraulic or pneumatic cylinders inherently produce linear motion. Many other mechanisms are used to generate linear motion from a rotating motor.
Valve actuatorA valve actuator is the mechanism for opening and closing a valve. Manually operated valves require someone in attendance to adjust them using a direct or geared mechanism attached to the valve stem. Power-operated actuators, using gas pressure, hydraulic pressure or electricity, allow a valve to be adjusted remotely, or allow rapid operation of large valves. Power-operated valve actuators may be the final elements of an automatic control loop which automatically regulates some flow, level or other process.
ReflectanceThe reflectance of the surface of a material is its effectiveness in reflecting radiant energy. It is the fraction of incident electromagnetic power that is reflected at the boundary. Reflectance is a component of the response of the electronic structure of the material to the electromagnetic field of light, and is in general a function of the frequency, or wavelength, of the light, its polarization, and the angle of incidence. The dependence of reflectance on the wavelength is called a reflectance spectrum or spectral reflectance curve.
