Standard-free composition measurements of AlxIn1-xN by low-loss electron energy loss spectroscopy

We demonstrate a standard-free method to retrieve compositional information in AlxIn1-xN thin films by measuring the bulk plasmon energy (E-p), employing electron energy loss spectroscopy (EELS) in a scanning transmission electron microscope (STEM). Two series of samples were grown by magnetron sputter epitaxy (MSE) and metal organic vapor phase epitaxy (MOVPE), which together cover the full compositional range 0