High-angular-range electrostatic rotary stepper micromotors fabricated with SOI technology
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Institute of Electrical and Electronics Engineers2012
We present the world's first backside-illuminated (BSI) single-photon avalanche diode (SPAD) based on standard silicon-on-insulator (SOI) complementary metal-oxide semiconductor (CMOS) technology. This SPAD achieves a good dark count rate (DCR) after backs ...
This paper analyzes some advantages of Silicon-on-Insulator (SOI) based photodetectors for bioluminescence imaging. It shows that SOI based sensors not only solve the bulk carriers problem, it can also act as a very selective spectral filter by acting as a ...
We present the modeling and experimental characterization of a monolithic 3-phase rotary stepper micromotor which employs a flexure suspension to guide the rotor. The monolithic structure avoids any frictional contact during operation, providing a precise, ...
