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Fabrication and properties of high-Q AlN/SiO2 composite TFBAR's for above IC oscillators

Related publications (62)

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Ultrahigh-quality-factor micro- and nanomechanical resonators using dissipation dilution

Tobias Kippenberg, Alberto Beccari, Nils Johan Engelsen

Mechanical resonators are widely used in sensors, transducers and optomechanical systems, where mechanical dissipation sets the ultimate limit to performance. Over the past 15 years, the quality factors in strained mechanical resonators have increased by f ...

Berlin2024

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Niobium nitride (NbN) is a particularly promising material for quantum technology applications, as it shows the degree of reproducibility necessary for large-scale superconducting circuits. We demonstrate that resonators based on NbN thin films present a o ...

2023

Optimization of Edge Profile for Improved Anti-Resonance Quality Factor in Lithium Niobate SH0 Resonators

Luis Guillermo Villanueva Torrijo, Silvan Stettler

Thin-film lithium niobate (LNO) has been identified as a promising material platform for enabling high electromechanical coupling and low-loss piezoelectric resonators for filtering applications. In this work, the design and fabrication of fundamental shea ...

IEEE2022

Reduced material loss in thin-film lithium niobate waveguides

Tobias Kippenberg, Guanhao Huang, Mikhail Churaev, Zihan Li, Di Zhu

Thin-film lithium niobate has shown promise for scalable applications ranging from single-photon sources to high-bandwidth data communication systems. Realization of the next generation high-performance classical and quantum devices, however, requires much ...

AIP Publishing2022

Aluminum Scandium Nitride as Piezoelectric Material for SAW/BAW Hybrid Resonators with Large Figure of Merit

Guilain Lionel Germain Lang

Nowadays, no less than 21 sensors are used to monitor the health conditions of aircraft engines. However, the actual state of technology do not allow the measurements on moving parts in harsh environment (i.e. rotor shaft and blades). Thanks to its straigh ...

2021

This article has been retracted due to a breach in confidentiality. The confidential information has been redacted to protect the privacy of those involved. The authors have been invited to re-submit a modified version of their manuscript for publication. ...

SPRINGER2020

Free standing and solidly mounted Lamb wave resonators based on Al0.85Sc0.15N thin film

Paul Muralt, Mohammad Fazel Parsapour Kolour, Vladimir Pashchenko

Lamb wave microresonators with wavelengths of 5-8m, vibrating in the S0 mode, and having 75 electrode pairs were fabricated and characterized. The results were compared to theoretical predictions obtained by finite element simulation. The active material w ...

AMER INST PHYSICS2019

Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Soumya Yandrapalli, Victor Plessky, Muhammad Faizan

This work presents the fabrication of a MEMS resonant device which addresses the need for high quality and miniaturized RF filters in the 3-6 GHz range for 5th generation (5G) mobile networks. The 4-mask fabrication process is based on the definition of in ...

IEEE2019

Micro- and nanoelectromechanical systems (MEMS/NEMS) have long shown their potential to disrupt the established technologies. Over the past 15 years, MEMS have become fundamental components in filters, accelerometers, gyroscopes and gas sensors. MEMS are n ...

EPFL2019

Miniaturization is a simple yet very powerful concept. Applied to devices, it opens to plethora of new applications. Microelectromechanical systems (MEMS) are the result of scaling down the dimensions of devices to the micron range or the nano range (NEMS) ...

EPFL2019