Comparison of Lead Zirconate Titanate Thin Films for Microelectromechanical Energy Harvester With Interdigitated and Parallel Plate Electrodes
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The self-polarization effect is investigated in Pb(Zr,Ti)O-3 (PZT) thin films deposited by sol-gel and magnetron sputtering techniques. The effective piezoelectric coefficient of as-grown films, which is proportional to their initial polarization (self-pol ...
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