Implementing MEMS technology for soft, (bio)electronics interfaces.
Related publications (41)
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Two-dimensional (2D) semiconductors, consisting of single-sheets of layered transition metal dichalcogenides (TMD), are attracting enormous interest from both fundamental science and technology. Monolayer molybdenum disulfide (MoS2), a typical example from ...
EPFL2015
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Microstereolithography is a 3D microfabrication technology that is fundamentally different from the techniques commonly used in cleanroom environment for the manufacturing of microelectromechanical system (MEMS) components. Most microfabrication techniques ...
Over the last decade, a growing interest in nanochemistry has emerged due to the interesting features of nanomaterials that vary with size, shape and surface structure. In particular, metal nanoparticles have received much attention due to their properties ...
Micro solid oxide fuel cells (μ-SOFCs) based on MEMS fabrication processes have become an increasingly attractive option for portable power generation applications, due to their high power density and their compatibility with hydrocarbon fuels. For system ...
Electronic devices based on organic semiconductors, such as field-effect transistors (OTFTs) and organic diodes have attracted significant interest as possible inexpensive and flexible alternatives to inorganic devices. Despite considerable improvement in ...
This thesis provides reliable methods and building blocks in order to realize smart SiF by combining Si- with foil-based components on flexible substrates. Building blocks such as 2-D and 3-D electrical interconnections, hybrid integration techniques and e ...
EPFL2015
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The interplay between residual stress state, cohesive and adhesive properties of coatings on substrates is reviewed in this article. Attention is paid to thin inorganic coatings on polymers, characterized by a very high hygro-thermo-mechanical contrast bet ...
Elsevier2010
This thesis presents the fabrication and characterization of organic thin film transistors (TFTs) on flexible polymer substrates and the development of compliant stencil lithography to significantly improve the patterning resolution on full-wafer scale. Po ...
EPFL2010
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This paper presents new results on miniaturized pentacene thin film transistors (TFTs) fabricated on a spin coated polyimide (PI) film. Patterning steps, which are vital for the integrity and electrical performance of organic TFTs, were done using resistle ...
2010
The wrinkling and delamination of stiff thin films adhered to a polymer substrate have important applications in “flexible electronics.” The resulting periodic structures, when used for circuitry, have remarkable mechanical properties because stretching or ...
