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PZT thin films for MEMS devices

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Dielectric elastomer actuators (DEAs) generate motion resembling natural muscles in reliability, adaptability, elongation, and frequency of operation. They are highly attractive in implantable soft robots or artificial organs. However, many applications of ...

AMER CHEMICAL SOC2023

Aperture-Controlled Fabrication of All-Dielectric Structural Color Pixels

Olivier Martin, Philippe Renaud, Arnaud Bertsch, Daniel Migliozzi, Evgenii Glushkov, Clémentine Sophie Sarah Lipp, Hsiang-Chu Wang, Audrey Zoé Marie Jacquillat

While interference colors have been known for a longtime, conventionalcolor filters have large spatial dimensions and cannot be used tocreate compact pixelized color pictures. Here we report a simple yetelegant interference-based method of creating microsc ...

AMER CHEMICAL SOC2023

Dielectric Actuation Techniques at the Nanoscale: Piezoelectricity and Flexoelectricity

Kaitlin Marie Howell

Micro- and nanoelectromechanical systems (MEMS/NEMS) have long shown their potential to disrupt the established technologies. Over the past 15 years, MEMS have become fundamental components in filters, accelerometers, gyroscopes and gas sensors. MEMS are n ...

EPFL2019

Low voltage fast dielectric elastomer actuators

Xiaobin Ji

This thesis contributes to the field of Dielectric Elastomer Actuators (DEAs). DEAs are electrostatically driven soft actuators that are fast, capable of generating large actuation strains, high forces, and present high power density. A wide range of appli ...

EPFL2019

Non-destructive piezoelectric characterisation of Sc doped aluminium nitride thin films at wafer level

Paul Muralt, Stefan Mertin, Clemens Benedict Nyffeler, Andrea Mazzalai

Scandium doped aluminium nitride (ScAlN) gained much attention during last years, since its piezoelectric response is much enlarged as compared to pure AlN films. Above 30% Sc the films are of high interest for piezoMEMS sensing and actuation, ultrasound g ...

IEEE2019

645 V Quasi-Vertical GaN Power Transistors on silicon substrates

Elison de Nazareth Matioli, Riyaz Mohammed Abdul Khadar, Chao Liu

In this paper, we present GaN-on-Si vertical transistors consisting of a 6.7 pm thick n-p-n heterostructure grown on 6-inch silicon substrates by MOCVD. The fabricated vertical trench gate MOSFETs exhibited E-mode operation with a threshold voltage of 3.3 ...

IEEE2018

Doping aluminium nitride with scandium is one of the recent techniques used to improve piezoelectric performance of thin films in the field of MEMS. Highly dependent on the sputtering parameters, the quality of these films is subject to complex optimizatio ...

2018

Internal electric fields and electrode effects in ferroelectric thin films for piezoelectric energy harvesting

Robin Nigon

The continuing decrease of power requirements of electronic circuits offers the potential to deploy wireless systems as embedded sensors for cars or industrial tools, and implanted medical devices. Harvesting ambient vibrations by an appropriate energy har ...

EPFL2017

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Acoustic delay lines based on Al0.85Sc0.15N thin film hybrid transducers were investigated by finite element modeling. It was found that an acoustic impedance matching between transducer and non-piezoelectric substrate material plays a crucial role to effi ...

Ieee2017

Dielectric Transduction of NEMS

Kaitlin Marie Howell

We report on a four-mask process flow for creating resonant NanoElectroMechanical Systems (NEMS) based on dielectric transduction. Current transduction mechanisms for NEMS include piezoelectricity, flexoelectricity and dielectric force. While piezoelectric ...

2017