Publication
Fabrication process and characterization of suspended graphene membranes for RF NEMS capacitive switches
Mihai Adrian Ionescu, Clara-Fausta Moldovan, Wolfgang Amadeus Vitale, Laurent Syavoch Bernard, Pankaj Sharma
2015
Journal paper
2015
Journal paper
Abstract
The fabrication of a Nanoelectromechanical System (NEMS) capacitive switch consisting of a suspended multilayer graphene membrane, doubly clamped on a coplanar waveguide (CPW) is presented and its RF performance is evaluated. The scattering parameters are measured and compared with theory in order to assess rigorously the advantages of using multilayer graphene as a membrane for the switch. Our results show that while, in theory, graphene remains a promising candidate for NEMS applications, significant efforts are needed for improving the fabrication process of suspended graphene membranes and the quality and reproducibility of reported devices.
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Graphene (ˈgræfiːn) is an allotrope of carbon consisting of a single layer of atoms arranged in a hexagonal lattice nanostructure. The name is derived from "graphite" and the suffix -ene, reflecting the fact that the graphite allotrope of carbon contains numerous double bonds. Each atom in a graphene sheet is connected to its three nearest neighbors by σ-bonds and a delocalised π-bond, which contributes to a valence band that extends over the whole sheet.
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Graphite oxide (GO), formerly called graphitic oxide or graphitic acid, is a compound of carbon, oxygen, and hydrogen in variable ratios, obtained by treating graphite with strong oxidizers and acids for resolving of extra metals. The maximally oxidized bulk product is a yellow solid with C:O ratio between 2.1 and 2.9, that retains the layer structure of graphite but with a much larger and irregular spacing.
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