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Microsystems and Sensors

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Yves Bellouard
2011
Book chapter

Abstract

In this chapter, the use of femtosecond laser to fabricate glass-based microsystems and sensors is examined. Several advanced technology demonstrators are presented, including some very unusual fused silica MEMS. Present technological barriers are discussed.

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https://infoscience.epfl.ch/record/210100?ln=en

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Related concepts (14)

Related publications (39)

Related MOOCs (3)

Mode locking is a technique in optics by which a laser can be made to produce pulses of light of extremely short duration, on the order of picoseconds (10−12 s) or femtoseconds (10−15 s). A laser operated in this way is sometimes referred to as a femtosecond laser, for example, in modern refractive surgery. The basis of the technique is to induce a fixed phase relationship between the longitudinal modes of the laser's resonant cavity. Constructive interference between these modes can cause the laser light to be produced as a train of pulses.

Pulsed operation of lasers refers to any laser not classified as continuous wave, so that the optical power appears in pulses of some duration at some repetition rate. This encompasses a wide range of technologies addressing a number of different motivations. Some lasers are pulsed simply because they cannot be run in continuous mode. In other cases the application requires the production of pulses having as large an energy as possible.

Ultrashort pulse

In optics, an ultrashort pulse, also known as an ultrafast event, is an electromagnetic pulse whose time duration is of the order of a picosecond (10−12 second) or less. Such pulses have a broadband optical spectrum, and can be created by mode-locked oscillators. Amplification of ultrashort pulses almost always requires the technique of chirped pulse amplification, in order to avoid damage to the gain medium of the amplifier. They are characterized by a high peak intensity (or more correctly, irradiance) that usually leads to nonlinear interactions in various materials, including air.

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On the interaction of femtosecond laser pulses with layered dielectric materials

Materials properties are strictly dependent on their microstructure. The internal symmetries and the disposition of the constituting atoms of a material, which depend on its crystallographic structure, greatly affect its response to mechanical, electromagn ...

EPFL2023

Femtosecond-laser direct-write photoconductive patterns on tellurite glass

Yves Bellouard, Gözden Torun, Anastasia Romashkina

We report the formation of arbitrary photoconductive patterns made of tellurium (Te) nanocrystals by exposing a tellurite (TeO2-based) glass to femtosecond laser pulses. During this process, Te/TeO2-glass nanocomposite interfaces with photoconductive prope ...

2024

Contactless Optical Packaging Concept for Laser to Fiber Coupling

Yves Bellouard, Saood Ibni Nazir

A novel method for the laser to fiber coupling is presented in which coarse alignment is achieved through micromachined v-grooves and mirrors in a fused silica substrate. Furthermore, fine repositioning is done in a noncontact manner by using a femtosecond ...

2021