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Publication
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In this chapter, the use of femtosecond laser to fabricate glass-based microsystems and sensors is examined. Several advanced technology demonstrators are presented, including some very unusual fused silica MEMS. Present technological barriers are discussed.
Yves Bellouard, Gözden Torun, Anastasia Romashkina
Yves Bellouard, Saood Ibni Nazir