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3D nanostructures fabricated by advanced stencil lithography
Related publications (34)
Plasma-Assisted Hybrid Vapour Deposition Technology for Thin Film Fabrication
Continuous development of thin film deposition technologies is essential for the fabrication of films that meet the specific requirements of their target applications and working conditions. Therefore, it is necessary to increase the number of accessible a ...
EPFL2023Synthesis of metal oxide-overcoated carbon materials by liquid phase ALD and their applications in catalysis
Coating nano particles and other substrates for efficiency enhancement, protection and obtaining new atomic structures is a widespread research topic in catalysis and material synthesis. Thus far, different approaches of coating, ranging from simplest to s ...
EPFL2023Nanobridge Stencil Enabling High Resolution Arbitrarily Shaped Metallic Thin Films on Various Substrates
Jürgen Brugger, Giovanni Boero, Yi-Chiang Sun
Stencil lithography (SL), which uses a perforated membrane as a reusable shadow mask to locally add material patterns on substrates provides a simple but versatile approach for the fabrication of functional devices on a large variety of substrate materials ...
WILEY2022Vapor deposition of metal halide perovskite thin films: Process control strategies to shape layer properties
Christophe Ballif, Quentin Thomas Jeangros, Florent Sahli, Quentin Jean-Marie Armand Guesnay
Vapor-based processes are particularly promising to deposit the perovskite thin film absorber of solar cells. These deposition methods are up-scalable, involve a controlled solvent-free environment, have the ability to conformally coat rough substrates, in ...
2021Miniaturized mr device comprising a cell culture micro-chamber and method for manufacturing such a device
Jürgen Brugger, Giovanni Boero, Marco Grisi, Gaurasundar Marc Conley
MR device (100) comprising a miniaturized magnetic resonance system (101) and a cell culture chamber (502) for the analysis of biological samples of less than about 1000 µm in size, wherein said device (100) is at least partially covered by a passivation-b ...
2020Deposition of Thin Alumina Films Containing 3D Ordered Network of Nanopores on Porous Substrates
Self-supporting thin films containing nanopores are very promising materials for use for multiple applications, especially in nanofiltration. Here, we present a method for the production of nanomembranes containing a 3D ordered network of nanopores in an a ...
2020Biodegradable Wireless Microheaters for Transient Biomedical Implants
Jürgen Brugger, Giovanni Boero, Matthieu Jean Michel Rüegg, Remo Blum
Transient electronics show a great potential in the field of bioresorbable medical implants, for applications such as localized drug delivery for wound healing or following a surgical procedure. Once their function is fulfilled, such implants naturally deg ...
2019Biodegradable Frequency‐Selective Magnesium Radio‐Frequency Microresonators for Transient Biomedical Implants
Jürgen Brugger, Giovanni Boero, Matthieu Jean Michel Rüegg, Remo Blum
Bioresorbable implantable medical devices show a great potential for applications requiring medical care over well‐defined periods of time. Once their function is fulfilled, such implants naturally degrade and resorb in the body, which eliminates adverse l ...
2019Bioresorbable Frequency-Selective Magnesium Microresonators Fabricated by Ion Beam Etching
Matthieu Jean Michel Rüegg, Remo Blum
We present an innovative microfabrication process to fabricate magnesium-based bioresorbable microelectromechanical systems (MEMS) by ion beam etching. This process enables the fabrication of thin biodegradable water-soluble passive electronic components w ...
2018Defect Healing and Charge Transfer-Mediated Valley Polarization in MoS2/MoSe2/MoS2 heterostructures
Andras Kis, Dumitru Dumcenco, Yen-Cheng Kung, Alessandro Surrente
Monolayer transition metal dichalcogenides (TMDCs) grown by chemical vapor deposition (CVD) are plagued by a significantly lower optical quality compared to exfoliated TMDCs. In this work, we show that the optical quality of CVD-grown MoSe2 is completely r ...
American Chemical Society2017