Publication
Miniaturized mr device comprising a cell culture micro-chamber and method for manufacturing such a device
Abstract
MR device (100) comprising a miniaturized magnetic resonance system (101) and a cell culture chamber (502) for the analysis of biological samples of less than about 1000 µm in size, wherein said device (100) is at least partially covered by a passivation-binding layer (800). The invention also concerns a method for manufacturing said device (100), comprising a step of depositing a thin passivation-binding layer (800) on said system (101) The depositing step is preferably performed through a deposition process selected from chemical vapor deposition and physical vapor deposition.
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Related concepts (15)
Chemical vapor deposition
Chemical vapor deposition (CVD) is a vacuum deposition method used to produce high-quality, and high-performance, solid materials. The process is often used in the semiconductor industry to produce thin films. In typical CVD, the wafer (substrate) is exposed to one or more volatile precursors, which react and/or decompose on the substrate surface to produce the desired deposit. Frequently, volatile by-products are also produced, which are removed by gas flow through the reaction chamber.
Physical vapor deposition
Physical vapor deposition (PVD), sometimes called physical vapor transport (PVT), describes a variety of vacuum deposition methods which can be used to produce thin films and coatings on substrates including metals, ceramics, glass, and polymers. PVD is characterized by a process in which the material transitions from a condensed phase to a vapor phase and then back to a thin film condensed phase. The most common PVD processes are sputtering and evaporation.
Electron-beam physical vapor deposition
Electron-beam physical vapor deposition, or EBPVD, is a form of physical vapor deposition in which a target anode is bombarded with an electron beam given off by a charged tungsten filament under high vacuum. The electron beam causes atoms from the target to transform into the gaseous phase. These atoms then precipitate into solid form, coating everything in the vacuum chamber (within line of sight) with a thin layer of the anode material.
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