NEMS (Nanoelectromechanical Devices) have been of particular interest in recent years due to a growing set of new applications they offer in domains such as sensitive charge detection, mass sensing and biological imaging. Their size, being reduced down to the nanometer-scale, allows high operating frequencies. Applications in the Gigahertz range have been demonstrated. With devices operating faster the sensitivity is improved. As an example, a sensitivity of 12 Zn/p Hz12 zN⁄√Hz (1zN=〖10〗^(-21) N) N) has been achieved using a carbon nanotube resonator. Moreover, NEMS have very low operating power and high quality factors.
Luis Guillermo Villanueva Torrijo, Seniz Esra Küçük, Soumya Yandrapalli, Victor Plessky
Christophe Ballif, Alessandro Francesco Aldo Virtuani, Hugo James André Quest, Marine Dominique Cauz, Fabian Heymann, Laure-Emmanuelle Perret Aebi, Christian Rod
Anna Fontcuberta i Morral, Elias Zsolt Stutz, Jean-Baptiste Leran, Mahdi Zamani, Simon Robert Escobar Steinvall, Vladimir Dubrovskii, Rajrupa Paul