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This abstract presents an aluminum nitride (AlN) piezoelectric actuator for tuning optical resonance modes of silicon nitride photonic resonators. The AlN actuator is fabricated on top of a thick silicon dioxide cladding that encapsulates the nitride resonator and waveguide. The PORT is defined by undercutting the cladding layer with a lateral silicon etch. It tunes the optical wavelength by 20pm on applying 60V to the top electrode with a 0.5nA current draw. The thick oxide cladding preserves the resonator's loaded quality factor Q(optical) of 64,000 across the entire tuning range. The first bending mode is at 1.1MHz enabling a tuning speed of
Tobias Kippenberg, Rui Ning Wang, Anat Siddharth, Andrey Voloshin, Viacheslav Snigirev, Andrea Bancora, Vladimir Shadymov