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AlScN thin films sputtering optimization

Related publications (36)

Plasma-Assisted Hybrid Vapour Deposition Technology for Thin Film Fabrication

Continuous development of thin film deposition technologies is essential for the fabrication of films that meet the specific requirements of their target applications and working conditions. Therefore, it is necessary to increase the number of accessible a ...

EPFL2023

Experiments and modelling for glow discharge plasmas applied to niobium sputter deposition in superconducting radiofrequency cavities

Thibaut François Hugo Richard

Thin film coatings are ubiquitous in modern daily lives, from the semi-conductor industry to aesthetic applications, and rely on the modification of a given material to enhance its surface properties. At CERN (European Organization for Nuclear Research), t ...

EPFL2019

Photocatalytic indoor/outdoor air treatment and bacterial inactivation on CuxO/TiO2 prepared by HiPIMS on polyester cloth under low intensity visible light

Sami Rtimi

In this study, photoactive CuxO/TiO2 coatings were prepared using magnetron sputtering operated at different powers and modes (Direct-current magnetron sputtering and High Power Impulse magnetron sputtering). Indoor/outdoor air pollutions (Volatile Organic ...

2019

Deciphering the Mechanisms of Bacterial Inactivation on HiPIMS Sputtered CuxO-FeOx-PET Surfaces: From Light Absorption to Catalytic Bacterial Death

Sami Rtimi, Adrien Alexis Paul Chauvet

The production of nontoxic, affordable, and efficient antibacterial surfaces is key to the well-being of our societies. In this aim, antibacterial thin films have been prepared using earth-abundant metals deposited using high-power impulse magnetron sputte ...

2019

Ultra-Thin Piezoelectric Film Optimization

Kaitlin Marie Howell, Tamara Miteva

This project focused on optimization of the deposition of platinum (Pt) thin films or use in piezoelectric MEMS/NEMS devices. Theory of piezoelectric, DC and DC-pulsed sputtering and thin film characterization was studied. Two parameters were varied in the ...

2017

Sputter Deposition Technology For Al((1-X))Sc(X)N Films With High Sc Concentration

Paul Muralt, Gabriel Christmann, Sylvain Nicolay, Stefan Mertin

Aluminium scandium nitride (Al1-xScxN) with its strongly enhanced piezoelectric response is the upcoming piezoelectric material of choice in next generation RF filters, sensors, actuators and energy harvesting devices. This paper will concentrate on the de ...

IEEE2017

Self-Sterilizing Sputtered Films for Applications in Hospital Facilities

César Pulgarin, Sami Rtimi, Stefanos Giannakis

This review addresses the preparation of antibacterial 2D textile and thin polymer films and 3D surfaces like catheters for applications in hospital and health care facilities. The sputtering of films applying different levels of energy led to the depositi ...

Molecular Diversity Preservation International2017

Beneficial effect of Cu on Ti-Nb-Ta-Zr sputtered uniform/adhesive gum films accelerating bacterial inactivation under indoor visible light

César Pulgarin, Juan Kiwi, Sami Rtimi

This article presents the evidence for the significant effect of copper accelerating the bacterial inactivation on Ti-Nb-Ta-Zr (TNTZ) sputtered films on glass up to a Cu content of 8.3 at.%. These films were deposited by dc magnetron co-sputtering of an al ...

Elsevier2017

Enhanced piezoelectric properties of c-axis textured aluminium scandium nitride thin films with high scandium content: influence of intrinsic stress and sputtering parameters

Paul Muralt, Gabriel Christmann, Silviu Cosmin Sandu, Stefan Mertin, Clemens Benedict Nyffeler, Mohammad Fazel Parsapour Kolour, Vladimir Pashchenko

Aluminium scandium nitride (ASN) exhibits a largely enhanced piezoelectric response as compared to aluminium nitride (AlN), which makes it an upcoming piezoelectric material for use in next generation RF filters, sensors, actuators and energy harvesting de ...

Ieee2017

In situ photoelectron spectroscopic characterization of reactively sputtered, doped vanadium oxide thin films

Andreas Schueler, Anna Krammer, Rosendo Sanjines, Olivia Valérie Charlotte Bouvard

Thin films of pure vanadium oxide (VOx) and Ge doped vanadium oxide (VOx:Ge) have been deposited by reactive magnetron sputtering on Si (100) substrates. These films were characterized by means of in situ X-ray photoelectron spectroscopy and ultraviolet ph ...

Wiley-Blackwell2016

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