Drastic breakdown field reduction in multilayer DEA
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Institute of Electrical and Electronics Engineers2009
We present an experimental study of the DC breakdown voltage of MEMS interdigitated aluminum electrodes with gaps ranging from 10 to 500 μm. Unlike most research on MEMS electrodes that was done at atmospheric pressure, our work has focused on the effect o ...
We present an experimental study of the DC breakdown voltage of MEMS interdigitated aluminum electrodes with gaps ranging from 10 to 500 µm. Unlike most research on MEMS electrodes, that was done at atmospheric pressure, our work has focused on the effect ...
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