Characterizing the surface of microlenses by optical profilers has the important advantages of measurement speed, flexibility and automation. Nevertheless, the accuracy of such characterization is limited by error occurring in non-flat measurements. Here, we propose a method that uses multiple measurements of a single reference ball combined with a machine learning algorithm that fits the experimental data to correct the measurements. The success of the method is demonstrated by showing that the residual error after correction reaches 20nm RMS. Such results extend greatly the quality of microlens characterization by optical profilers.
Jian Wang, Lesya Shchutska, Olivier Schneider, Yiming Li, Yi Zhang, Aurelio Bay, Guido Haefeli, Christoph Frei, Frédéric Blanc, Tatsuya Nakada, Michel De Cian, Luca Pescatore, François Fleuret, Elena Graverini, Renato Quagliani, Maria Vieites Diaz, Federico Betti, Aravindhan Venkateswaran, Luis Miguel Garcia Martin, Vitalii Lisovskyi, Sebastian Schulte, Veronica Sølund Kirsebom, Elisabeth Maria Niel, Mingkui Wang, Zhirui Xu, Lei Zhang, Ho Ling Li, Mark Tobin, Minh Tâm Tran, Niko Neufeld, Matthew Needham, Marc-Olivier Bettler, Maurizio Martinelli, Vladislav Balagura, Donal Patrick Hill, Liang Sun, Pietro Marino, Mirco Dorigo, Xiaoxue Han, Liupan An, Federico Leo Redi, Plamen Hristov Hopchev, Thibaud Humair, Maxime Schubiger, Hang Yin, Guido Andreassi, Violaine Bellée, Olivier Göran Girard, Preema Rennee Pais, Pavol Stefko, Tara Nanut, Maria Elena Stramaglia, Yao Zhou, Tommaso Colombo, Vladimir Macko, Guillaume Max Pietrzyk, Albert Puig Navarro, Evgenii Shmanin, Simone Meloni, Xiaoqing Zhou, Lino Ferreira Lopes, Surapat Ek-In, Carina Trippl, Sara Celani, Dipanwita Dutta, Zheng Wang, Yi Wang, Hans Dijkstra, Gerhard Raven, Peter Clarke, Frédéric Teubert, Giovanni Carboni, Victor Coco, Adam Davis, Paolo Durante, Wenyu Zhang, Yu Zheng, Anton Petrov, Maxim Borisyak, Feng Jiang, Zhipeng Tang, Luis Alberto Granado Cardoso, Daniel Hugo Cámpora Pérez, Xuan Li, Alexey Boldyrev, Almagul Kondybayeva, Hossein Afsharnia