Electron Beam Induced Copper Deposition from Carboxylate Precursors and the Study of Underlying Growth Mechanisms

The fabrication of defined and high-quality metal nanostructures is an ongoing topic of research. Direct-write deposition of copper nanostructures is of great value for many fields of research and industrial applications. Focused electron beam induced deposition (FEBID) is an additive fabrication technique with extremely high resolution and versatility. Physisorbed, gaseous precursor molecules are locally dissociated by a finely focused electron beam resulting in volatile fragments which desorb and non-volatile fragments forming the deposit. When applying suitable deposition parameters, these deposits can be as small as the beam diameter and have ideally little to no contamination. For electron beam induced metal deposition, metal-organic compounds are chosen as precursors. However, organic ligand material is often co-deposited, which is detrimental to the depositâs properties. This work addresses the study of the perfluorinated copper carboxylate [Cu2(ÎŒ-O2CC2F5)4] (Cu2(pfp)4) and its aminated derivatives Cu2(EtNH2)2(pfp)4 and Cu2(tBuNH2)2(pfp)4 as viable FEBID precursors. 25 at.% of copper was achieved with the amine free compound, and 15 at.% with each of the two aminated complexes. Based on the chemical analysis of the deposits, electron-induced dissociation paths were proposed for the adsorbed species, demonstrating the influence of the ligand chemistry and fragmentation on the deposit composition. In parallel, the perfluorinated silver carboxylate Ag2(pfp)2 was reported and compared directly to its copper equivalent. The silver complex yielded up to 74 at.% metal content and exhibited strong susceptibility to varying electron beam densities throughout the deposit. Cu2(pfp)4 did not manifest the same electron sensitivity. Theoretical models, combining analytical solutions with Monte Carlo simulations of primary and backscattered electrons were successfully fitted to the cross sections of deposits from both carboxylates, determining the growth regimes within a single spot deposit. Additionally, two previously reported Î²-diketonates, Cu(hfac)2 and Cu(tbaoac)2, were directly compared to the other Cu(II) precursors with the aim to determine any dependence of the ligand size, electron density or dwell time on the deposit purity. The investigations concluded that the metal content rather depends on the chemistry of the metal-ligand bond than on the ligand size. This applies to both, the variation of ligands and the variation of the metal center. vii Furthermore, two copper complexes, Cu(hfac)2 and Cu2(pfp)4, were investigated in situ with a dedicated, custom-made setup. The âeQCMâ combines a low energy electron source (10- 100 eV) with a quartz crystal microbalance and serves to study fundamental processes occurring during FEBI deposition. First results yielded the total dissociation cross section for each precursor at varying electron energies. Finally, alternative approaches for the electron induced copper deposition from Cu2(pfp)4 were investigated. A two-step post-purification recipe of as-deposited material was reported to yield pure copper crystals (> 97 at.%). Additionally, direct electron beam lithography in a layer of condensed precursor was explored. This room temperature deposition approach yielded in lower metal contents but could potentially produce high resolution deposition.

Single-molecule-level characterization of supramolecular systems at surfaces

Dietmar Payer

This thesis deals with the self-organization of individual building blocks, specifically organic molecules and metal atoms, into supramolecular structures on metal surfaces under ultra high vacuum conditions (UHV). Self-organization of supramolecular systems is a promising candidate for a bottom-up approach in the fabrication of complex structures with specific properties. This process is steered by interactions between functional groups of the individual building blocks and is of apparent interest to gain a detailed understanding of the influence and the behavior of these functional groups enabling intermolecular binding. In the first part of the thesis, we investigate hydrogen bonded structures on metal surfaces. Of especial interest is the possibility of the formation of ionic hydrogen bonds, a special class of hydrogen bond which connects a charged donor (acceptor) and a neutral acceptor (donor) and is important in biological systems. By combined Scanning Tunneling Microscopy (STM), X-ray Photoelectron Spectroscopy (XPS) and Near Edge X-ray Absorption Fine Structure (NEXAFS) measurement we show the deprotonation of carboxylic functions in the molecules, forming carboxylate groups involved in intermolecular binding. With our complementary experimental and theoretical examinations we clearly show that the carboxylate groups are indeed still charged although adsorbed onto a conducting metal surface and that the observed structures can be computationally reproduced by using these charges in classical molecular dynamic calculations. Our investigations clearly reveal that all requirements for the formation of ionic hydrogen bonds in these samples at metal surfaces under solvent free conditions are fulfilled. In the second part, the confinement of surface state electrons in self-assembled hydrogen-bonded structures is investigated. The examined structure contains two-dimensional cavities, with different inner diameters in the periodic arrangement and in domain boundaries. Inside the cavities we detect a spatially localized modification in the local density of states (LDOS) of the Ag(111) surface state electrons. The energy of the peak correlates with the cavity area as predicted by a simple "particle in a box" model. This clearly shows that the surface state electrons form a confined state inside the cavities. Furthermore we examine self-assembled periodic structures as templates for binding single macrocyclic molecules. The macrocyclic molecules can be deposited by sublimation, as STM-topographs with submolecular resolution reflect the shape of the intact molecules and reveal a coverage dependent aggregation behavior. We show that it is possible to fabricate a structure in which at most one macrocyclic molecule per pore can be found in a defined binding position. In the last part of the thesis we investigate the influence of individual metal atoms on the chemical activity and the self-assembly process of molecules on metal surfaces. First, we demonstrate the high chemical reactivity of these metal atoms. In our experiments we address the chemical reactivity of static active sites, like kinks and step edges, and of dynamic active sites, like the metal atoms, separately. Doing this we show that a non-negligible amount of the chemical reactivity of a metal surface is due to this dynamic adatom gas. Furthermore the influence of metal atoms on the structure formation of organic molecules is investigated. We show that two-dimensional structures based on a complex formation between metal centers and ligands can be formed and that the coordination number is independent of the substrate symmetry. Furthermore, we show the possibility that on metal surfaces one can prepare three-fold coordinated Fe-centers, a coordination number which is rarely seen in three dimensional chemistry. In the last part we study catenanes, which consist of two interlocked macrocyclic molecules. Main interest is on the confirmation of a structural change of the catenanes adsorbed on a metal substrate. For our experiments we use the fact that the catenanes are designed to "trap" a Cu-atom by complex formation. As this reaction is associated with a structural change and a change in intermolecular interaction, we can verify a reaction of catenanes adsorbed onto a surface with Cu adatoms and therefore a structural alteration by simply imaging the formed structures. Our measurements show the possibility of depositing large molecules like catenanes by sublimation and of their potential for use as molecular machines adsorbed onto metal surfaces.

EPFL2007

Chemical and electrochemical promotion of supported rhodium catalyst

Olena Baranova

The chemical and electrochemical promotion of highly dispersed nanofilm Rh catalysts (dispersion: about 10 %, film thickness: 40 nm) has been investigated for the first time. To this end Rh metal was sputter-deposited, either on a purely ionic conductor (8 % Y2O3-stabilized ZrO2) or on a mixed ionic-electronic conductor (TiO2), the latter being a highly dispersed layer of TiO2 (4 µm) deposited on YSZ. These catalysts are designated as Rh/YSZ and Rh/TiO2/YSZ, respectively. It was established analytically that both in the Rh/YSZ and in the Rh/TiO2/YSZ system, the catalyst films have a nanoparticle-size grain structure. The Rh supported on titania is rather porous, exhibiting a higher dispersion and surface area than Rh on YSZ. Both after reduction (H2, T=400 °C) and after oxidation (O2, T=400 °C), Rh supported on TiO2 was found to be in a more highly reduced state than Rh on YSZ. After reducing treatment, the Rh/TiO2/YSZ samples contain a larger amount of weakly bonded oxygen, which can be attributed to oxygen "backspillover" from the TiO2. A major feature of this research was the electrochemical characterization of the oxygen/Rh/solid electrolyte three-phase boundary by steady-state polarization measurements and by impedance spectroscopy. These are powerful techniques for extracting experimental trends and details that are useful for an understanding of the electrochemical promotion principles. It was shown that the exchange current densities at the Rh/solid electrolyte interface are lower on account of the TiO2 layer. The exchange current densities are more than twice lower at Rh/TiO2(4 µm)/YSZ than at Rh/YSZ, demonstrating that the former interface is much more polarizable. The mechanism of oxygen exchange occurring close to equilibrium (O2/O2- couple) was investigated for the first time at Rh catalyst electrodes interfaced with solid electrolyte. The processes of cathodic oxygen reduction and anodic oxygen evolution are not symmetric, but they are similar in the two systems, Rh/YSZ and Rh/TiO2(4 µm)/YSZ. The cathodic process consists of three steps: dissociative adsorption of oxygen at the gas-exposed Rh surface, atomic oxygen diffusion to the electrochemical reaction sites (ERS), and a two-electron transfer to this oxygen on the ERS. The cathodic process is limited by interfacial diffusion of oxygen atoms from the gas-exposed metal surface to the ERS. The anodic process includes two steps: two-electron transfer reaction, which is the rate-determining step, and oxygen desorption to the gas phase. With data obtained from impedance spectroscopy at the equilibrium potential, it was possible to confirm the reaction scheme proposed. It was demonstrated that Rh nanofilm catalysts interfaced with YSZ or TiO2/YSZ can be electrochemically promoted for the reaction of ethylene oxidation. Small anodic currents cause periodic oscillations in catalytic rate and potential of the Rh/YSZ catalyst, while at Rh/TiO2/YSZ they give rise to a stable and reversible rate enhancement by up to a factor 80. The increase in ethylene oxidation rate is up to 2000 times larger than the electrochemical rate, I/2F, of O2- oxidation. The pronounced electrochemical promotion behavior that has been observed is due to the anodically controlled migration of O2- species from the electrolyte to the Rh/gas interface. At the Rh surface, these species destabilize the formation of rhodium surface oxide (Rh2O3). The existence of backspillover oxygen species has been confirmed by impedance measurements under positive applied potential. Another significant result for heterogeneous catalysis is the finding that thick as well as thin films of Rh/TiO2/YSZ catalyst are open to chemical promotion of ethylene oxidation and partial methane oxidation, ie, they offer a higher catalytic activity and stability than the Rh/YSZ catalysts. The modification of catalytic activity observed for Rh/TiO2/YSZ was attributed to either a "long-range" electronic-type SMSI mechanism or to a self-driven electrochemical promotion mechanism. In both cases, the ultimate cause of promotion are different work functions of catalyst and support. Equilibration of the work functions of two solids in contact induces surface charging, a migration of O2- ions to the catalyst/gas interface, and a weakening of the Rh-O chemisorptive bonds. It facilitates reduction of oxidized surface sites. Another important achievement of the present work was that of exploring and confirming the possibilities of current-assisted activation of Rh/TiO2/YSZ catalysts. In partial methane oxidation using close to stoichiometric gas compositions (CH4 : O2 = 2 : 1) at 550 °C, the inactive (oxidized) Rh/TiO2/YSZ catalyst was successfully activated by applied currents, either positive or negative. This phenomenon is an example of "permanent" electrochemical promotion furnishing a permanent rate enhancement ratio of γ = 11. The activation by negative currents is explained in terms of an electrochemical reduction of rhodium surface oxide, while the activation by positive currents can be explained by the mechanism of electrochemical promotion.

EPFL2005

Low-dimensional supramolecular architectures at metal surfaces

Sebastian Stepanow

This thesis is concerned with supramolecular architectures assembled at metal surfaces. The investigations pursued two objectives. On the one hand, the focus was placed on the fabrication of low-dimensional surface-supported network structures by applying the concepts of conventional three-dimensional supramolecular chemistry at surfaces. Three main driving forces were explored for the construction of low-dimensional assemblies: hydrogen bonding, metal coordination and ionic interactions. The realized structures were characterized by scanning tunneling microscopy (STM) under ultra-high vacuum conditions. In particular, the interplay between the adsorbate-substrate coupling and lateral adsorbate interactions was addressed in the experiments. Further, the electronic and magnetic properties of the fabricated coordination structures were investigated. This characterization was done by x-ray absorption experiments at the synchrotron facility in Grenoble. Moreover, the response of the metal units and open cavity structures to the adsorption of large organic and small gas molecules was studied by temperature controlled STM experiments. The first part of the thesis deals with hydrogen bonded supramolecular assemblies. Simple aromatic carboxylic acids were employed to study the assembly principles and in particular effects arising from the substrate and molecular structure. The investigation of TPA (1,4-benzenedicarboxylic acid) adlayers on Cu(100) at different substrate temperatures revealed how the protonation status of the carboxyl moieties affects the topology of the assemblies. Further, the influence of the molecular backbone functionality and symmetry is addressed in comparative investigations on TPA and PDA (2,5-pyrazinedicarboxylic acid) as well as BDA (4,4'-biphenyldicarboxylic acid) and SDA (4',4" trans-ethene-l,2-diyl-bisbenzoic acid) adlayers on Cu(100). In the second part of the thesis, metal-ligand interactions were employed for the construction of supramolecular architectures at a Cu(100) surface. The concepts of conventional coordination chemistry were successfully applied at the surface. Iron atoms in conjunction with rod-like aromatic molecular linkers comprising carboxyl, pyridyl and hydroxyl functional groups assemble into a rich variety of open network structures with distinctly arranged mono- and diiron coordination centers and well-defined cavities. The results show that the adsorbate-substrate coupling considerably affects the local coordination environment of the iron units when the molecular backbone length is varied. The occurrence of structural isomerism in open network structures is addressed in a comparative study of heterofunctional and homofunctional linker molecules. It is shown that the former ligand allows only one topologically pure structure while the other linker forms two phases with different topology. The hydroxyl ligand has been used to construct distorted hexagonal coordination networks containing threefold coordinated single iron atoms. The comparison between the networks on Cu(100) and Ag(111) surfaces shows marked differences, which are attributed to adsorbate-substrate interactions. Finally, a novel design strategy for the fabrication of two-dimensional coordination structures at surfaces is introduced by using alkali metal ions in conjunction with carboxylate ligands. The interaction between the components is dominated by electrostatic forces and is of intermediate bond strength as in the case of hydrogen bonding and transition metal coordination. It is expected, that substrate symmetry and registry plays a larger role in the network formation, because the ionic interaction is not directional. The chemical as well as magnetic properties of the fabricated coordination networks are examined in the last part of the thesis. The adsorption of C60 molecules on open network structures reveals how cavity size and chemical functionality affect the bond strength to the guest molecules as well as the number of accommodated C60 molecules. Since transition metal clusters, and in particular diiron units, are the catalytic active centers in various proteins, the reactivity of various mono- and diiron coordination structures to molecular oxygen was investigated in temperature controlled STM experiments. In particular, the focus was placed on the structural relaxation upon gas adsorption and chemical reaction. At last, the magnetic properties of the metal coordination centers are addressed in XMCD experiments. The iron units are found to be paramagnetic at temperatures down to 5 K and show distinct magnetic anisotropy and magnetization loops. These experiments demonstrate that surface-supported metal coordination structures are a promising class of materials for applications in the field of heterogenous catalysis and surface magnetism.

EPFL2005

Chemical and electrochemical promotion of supported rhodium catalyst

Olena Baranova

EPFL2005

Single-molecule-level characterization of supramolecular systems at surfaces

Dietmar Payer

EPFL2007

Low-dimensional supramolecular architectures at metal surfaces

Sebastian Stepanow

EPFL2005