Publication

Electron Beam Induced Copper Deposition from Carboxylate Precursors and the Study of Underlying Growth Mechanisms

Luisa Berger
2020
Thèse EPFL
Résumé

The fabrication of defined and high-quality metal nanostructures is an ongoing topic of research. Direct-write deposition of copper nanostructures is of great value for many fields of research and industrial applications. Focused electron beam induced deposition (FEBID) is an additive fabrication technique with extremely high resolution and versatility. Physisorbed, gaseous precursor molecules are locally dissociated by a finely focused electron beam resulting in volatile fragments which desorb and non-volatile fragments forming the deposit. When applying suitable deposition parameters, these deposits can be as small as the beam diameter and have ideally little to no contamination. For electron beam induced metal deposition, metal-organic compounds are chosen as precursors. However, organic ligand material is often co-deposited, which is detrimental to the deposit’s properties. This work addresses the study of the perfluorinated copper carboxylate [Cu2(ÎŒ-O2CC2F5)4] (Cu2(pfp)4) and its aminated derivatives Cu2(EtNH2)2(pfp)4 and Cu2(tBuNH2)2(pfp)4 as viable FEBID precursors. 25 at.% of copper was achieved with the amine free compound, and 15 at.% with each of the two aminated complexes. Based on the chemical analysis of the deposits, electron-induced dissociation paths were proposed for the adsorbed species, demonstrating the influence of the ligand chemistry and fragmentation on the deposit composition. In parallel, the perfluorinated silver carboxylate Ag2(pfp)2 was reported and compared directly to its copper equivalent. The silver complex yielded up to 74 at.% metal content and exhibited strong susceptibility to varying electron beam densities throughout the deposit. Cu2(pfp)4 did not manifest the same electron sensitivity. Theoretical models, combining analytical solutions with Monte Carlo simulations of primary and backscattered electrons were successfully fitted to the cross sections of deposits from both carboxylates, determining the growth regimes within a single spot deposit. Additionally, two previously reported β-diketonates, Cu(hfac)2 and Cu(tbaoac)2, were directly compared to the other Cu(II) precursors with the aim to determine any dependence of the ligand size, electron density or dwell time on the deposit purity. The investigations concluded that the metal content rather depends on the chemistry of the metal-ligand bond than on the ligand size. This applies to both, the variation of ligands and the variation of the metal center. vii Furthermore, two copper complexes, Cu(hfac)2 and Cu2(pfp)4, were investigated in situ with a dedicated, custom-made setup. The “eQCM” combines a low energy electron source (10- 100 eV) with a quartz crystal microbalance and serves to study fundamental processes occurring during FEBI deposition. First results yielded the total dissociation cross section for each precursor at varying electron energies. Finally, alternative approaches for the electron induced copper deposition from Cu2(pfp)4 were investigated. A two-step post-purification recipe of as-deposited material was reported to yield pure copper crystals (> 97 at.%). Additionally, direct electron beam lithography in a layer of condensed precursor was explored. This room temperature deposition approach yielded in lower metal contents but could potentially produce high resolution deposition.

À propos de ce résultat
Cette page est générée automatiquement et peut contenir des informations qui ne sont pas correctes, complètes, à jour ou pertinentes par rapport à votre recherche. Il en va de même pour toutes les autres pages de ce site. Veillez à vérifier les informations auprès des sources officielles de l'EPFL.
Concepts associés (38)
Microscopie électronique en transmission
vignette|upright=1.5|Principe de fonctionnement du microscope électronique en transmission. vignette|Un microscope électronique en transmission (1976). La microscopie électronique en transmission (MET, ou TEM pour l'anglais transmission electron microscopy) est une technique de microscopie où un faisceau d'électrons est « transmis » à travers un échantillon très mince. Les effets d'interaction entre les électrons et l'échantillon donnent naissance à une image, dont la résolution peut atteindre 0,08 nanomètre (voire ).
Ligand (chimie)
Un ligand est un atome, un ion ou une molécule portant des groupes fonctionnels lui permettant de se lier à un ou plusieurs atomes ou ions centraux. Le terme de ligand est le plus souvent utilisé en chimie de coordination et en chimie organométallique (branches de la chimie inorganique). L'interaction métal/ligand est du type acide de Lewis/base de Lewis. La liaison ainsi formée est nommée « liaison covalente de coordination ».
Cuivre
Le cuivre est l'élément chimique de numéro atomique 29, de symbole Cu. Le corps simple cuivre est un métal. Le cuivre est un élément du groupe 11, de la , un élément du bloc d métal de transition chalcophile. Dans le tableau périodique des éléments, le cuivre est de la même famille que l'argent et l'or, parce que tous possèdent une orbitale s occupée par un seul électron sur des sous-couches p et d totalement remplies, ce qui permet la formation de liaisons métalliques (configuration électronique Ar 3d 4s).
Afficher plus
Publications associées (81)

Tuning the reactivity of uranium towards small molecules in multimetallic complexes

Nadir Jori

One of the main goals of organometallic chemistry in the last decades was the activation of small molecule in mild reaction conditions. Even though multiple examples of catalytic cycles able to produce fine chemicals from cheap and abundant sources using t ...
EPFL2023

Charge Dynamics Electron Microscopy Nanoscale Imaging of Femtosecond Plasma Dynamics

Fabrizio Carbone, Giovanni Maria Vanacore, Ivan Madan, Gabriele Berruto, Ido Kaminer, Simone Gargiulo, Luca Piazza, Francesco Barantani, Tom Theodorus Antonius Lummen

Understanding and actively controlling the spatiotemporal dynamics of nonequilibrium electron clouds is fundamental for the design of light and electron sources, high power electronic devices, and plasma-based applications. However, electron clouds evolve ...
AMER CHEMICAL SOC2023

Development of a magnetic calcium-alginate hydrogel-sphere encapsulated with Fe-Mn-Zr ternary metal composite for heavy metal adsorption

Yi Yang, Xinyi Huang

Heavy metal contamination has become one of the greatest global environmental problems. In this study, a magnetic calcium-alginate hydrogel-sphere encapsulated with Fe-Mn-Zr ternary-metal composite (MCHETC) was prepared through a combined co-precipitation ...
2023
Afficher plus
MOOCs associés (15)
Micro and Nanofabrication (MEMS)
Learn the fundamentals of microfabrication and nanofabrication by using the most effective techniques in a cleanroom environment.
Microstructure Fabrication Technologies I
Learn the fundamentals of microfabrication and nanofabrication by using the most effective techniques in a cleanroom environment.
Micro and Nanofabrication (MEMS)
Learn the fundamentals of microfabrication and nanofabrication by using the most effective techniques in a cleanroom environment.
Afficher plus

Graph Chatbot

Chattez avec Graph Search

Posez n’importe quelle question sur les cours, conférences, exercices, recherches, actualités, etc. de l’EPFL ou essayez les exemples de questions ci-dessous.

AVERTISSEMENT : Le chatbot Graph n'est pas programmé pour fournir des réponses explicites ou catégoriques à vos questions. Il transforme plutôt vos questions en demandes API qui sont distribuées aux différents services informatiques officiellement administrés par l'EPFL. Son but est uniquement de collecter et de recommander des références pertinentes à des contenus que vous pouvez explorer pour vous aider à répondre à vos questions.