Shining Diamond: from Micro- and Nano-Engineering to Quantum Photonics
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American Soc Mechanical Engineers, Three Park Avenue, New York, Ny 10016-5990 Usa2005
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International Society for Optical Engineering, Bellingham WA, WA 98227-0010, United States2006
The authors address feature-size dependence in Ar/Cl2 chemically assisted ion beam etching (CAIBE) in the context of the fabrication of photonic crystal (PhC) structures. They systematically investigate the influence of various parameters such a ...
We present the local polymer infiltration of planar photonic crystal cavities via a maskless laser-writing technique. After the infiltration of the air holes with a UV-curable monomer a focused laser is used to locally polymerize the monomer in selected ho ...
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