Ni80Fe20 nanotubes with optimized spintronic functionalities prepared by atomic layer deposition

Permalloy Ni80Fe20 is one of the key magnetic materials in the field of magnonics. Its potential would be further unveiled if it could be deposited in three dimensional (3D) architectures of sizes down to the nanometer. Atomic Layer Deposition, ALD, is the technique of choice for covering arbitrary shapes with homogeneous thin films. Early successes with ferromagnetic materials include nickel and cobalt. Still, challenges in depositing ferromagnetic alloys reside in the synthesis via decomposing the constituent elements at the same temperature and homogeneously. We report plasma-enhanced ALD to prepare permalloy Ni80Fe20 thin films and nanotubes using nickelocene and iron(iii) tert-butoxide as metal precursors, water as the oxidant agent and an in-cycle plasma enhanced reduction step with hydrogen. We have optimized the ALD cycle in terms of Ni : Fe atomic ratio and functional properties. We obtained a Gilbert damping of 0.013, a resistivity of 28 mu omega cm and an anisotropic magnetoresistance effect of 5.6 % in the planar thin film geometry. We demonstrate that the process also works for covering GaAs nanowires, resulting in permalloy nanotubes with high aspect ratios and diameters of about 150 nm. Individual nanotubes were investigated in terms of crystal phase, composition and spin-dynamic response by microfocused Brillouin Light Scattering. Our results enable NiFe-based 3D spintronics and magnonic devices in curved and complex topology operated in the GHz frequency regime.

Plasma-enhanced atomic layer deposition of nickel nanotubes with low resistivity and coherent magnetization dynamics for 3D spintronics

Simon Robert Escobar Steinvall, Anna Fontcuberta i Morral, Julien Gay, Maria Carmen Giordano, Dirk Grundler

We report plasma-enhanced atomic layer deposition (ALD) to prepare conformal nickel thin films and nanotubes by using nickelocene as a precursor, water as the oxidant agent and an in-cycle plasma enhanced reduction step with hydrogen. The optimized ALD pulse sequence, combined with a post-processing annealing treatment, allowed us to prepare 30 nm thick metallic Ni layers with a resistivity of 8 μΩcm at room temperature and good conformality both on the planar substrates and nanotemplates. Thereby we fabricated several micrometer-long nickel nanotubes with diameters ranging from 120 to 330 nm. We report on the correlation between ALD growth and functional properties of individual Ni nanotubes characterized in terms of magneto-transport and the confinement of spin wave modes. The findings offer novel perspectives for Ni-based spintronics and magnonic devices operated in the GHz frequency regime with a 3D device architecture.

2020

Atomic layer deposition of Ni and Ni80Fe20 for tubular spin-wave nanocavities

Maria Carmen Giordano

Magnetic thin films and magnetic nanostructures have become essential components of modern technological applications. Modern branches of magnetisms focus on spin-charge coupling (spintronics) and the collective excitation of spin waves in magnetically ordered materials (magnonics). In particular, spin waves represent a promising charge-free medium to encode and transmit information in the GHz frequency regime, relevant for microwaves technologies. The ever-increasing demand for compact and portable electronic and telecommunication devices leads to the need for further miniaturization and high integration density of their functional components. These aspects have prompted nanomagnetism to venture the third dimension. This development is also motivated by novel physical phenomena and functionalities predicted to arise from three-dimensional (3D) complex magnetic configurations. In order to advance the research in 3D spintronics and 3D magnonics, it will be essential to have control over the fabrication of 3D nanoarchitectures and to access the new properties of individual nanostructures emerging from new complex 3D spin-textures. These two challenges are addressed in this thesis. Ferromagnetic nanotubes (NTs) represent the ideal 3D system for the study of shape dependent static and dynamic magnetic properties. Their magnetic configurations, as well as the spin wave confinement and propagation inside them, can be engineered by changing their geometrical parameters. First, in order to fabricate 3D magnetic device architectures, we explored atomic layer deposition (ALD). The thickness and quality of the thin films deposited with ALD are irrespective of the geometry of the surface on which they are deposited. This characteristic makes it ideal to fabricate 3D nanomagnets by magnetically coating 3D nanotemplates, e.g. nanowires (NWs) in the case of NTs. In this thesis we propose ALD processes for the conformal coating by means of two ferromagnetic materials conventionally used in planar spintronics and magnonics systems: Ni and permalloy (Py, Ni80Fe20), the second material expected to have a lower spin wave damping. By identifying correlations between ALD process parameters and thin film properties we optimized the materials in terms of conformality, electrical resistivity, anisotropic magnetoresistance (AMR) effect, spin wave damping and, in the case of permalloy, also stoichiometry. The optimized materials were then transferred onto GaAs nanowires templates, obtaining ferromagnetic NTs with hexagonal cross sections. We achieved Ni NTs with the lowest resistivity ever reported in similar ALD-grown Ni systems and a large AMR effect. We observed the lowest spin waves damping for permalloy NTs, exhibithing a value comparable with permalloy thin films achieved with conventional planar deposition techniques. Second, we investigated magnetic states and spin waves confinement in nanotubes experimentally and via micromagnetic simulations. We combined magnetoresistance measurements with Brillouin light scattering spectroscopy (BLS) and micromagnetic simulations to study Ni and Py NTs. BLS measurements, performed while irradiating NTs with microwaves, show that these nanotubes form spin-wave nanocavities which impose discrete wave vectors and confine GHz microwave signals on the nanoscale. Our experimental results show that the confinement can be engineered by changing the NT's geometrical parameters and magnetic states.

EPFL2021

Magnetic states of an individual Ni nanotube probed by anisotropic magnetoresistance

Anna Fontcuberta i Morral, Dirk Grundler, Martin Heiss, Daniel Rüffer, Eleonora Russo

Defined magnetization states in magnetic nanotubes could be the basic building blocks for future memory elements. To date, it has been extremely challenging to measure the magnetic states at the single-nanotube level. We investigate the magnetization states of an individual Ni nanotube by measuring the anisotropic magnetoresistance effect at cryogenic temperature. Depending on the magnitude and direction of the magnetic field, we program the nanotube to be in a vortex- or onion-like state near remanence.

Royal Soc Chemistry2012

Atomic layer deposition of Ni and Ni80Fe20 for tubular spin-wave nanocavities

Maria Carmen Giordano

EPFL2021