Edoardo Charbon, Claudio Bruschini, Myung Jae Lee, Feng Liu
We introduce a new family of single-photon avalanche diodes (SPADs) with enhanced depletion regions in a 55-nm Bipolar-CMOS-DMOS (BCD) technology. We demonstrate how to systematically engineer doping profiles in the main junction and in deep p-well layers ...
Piscataway2024