Three-dimensional in situ imaging of single-grain growth in polycrystalline In2O3:Zr films

Understanding grain morphology and kinetics of solid-phase crystallization is important for controlling the functional properties of polycrystalline materials. Here, in situ coherent X-ray diffraction imaging and transmission electron microscopy elucidate quantitatively the kinetics of a single-grain growth in Zr-doped In2O3 films. Strain and interactions at grain boundaries during solid-phase crystallization are known to play a significant role in the functional properties of polycrystalline materials. However, elucidating three-dimensional nanoscale grain morphology, kinetics, and strain under realistic conditions is challenging. Here, we image a single-grain growth during the amorphous-to-polycrystalline transition in technologically relevant transparent conductive oxide film of In2O3:Zr with in situ Bragg coherent X-ray diffraction imaging and transmission electron microscopy. We find that the Johnson-Mehl-Avrami-Kolmogorov theory, which describes the average kinetics of polycrystalline films growth, can be applied to the single grains as well. The quantitative analysis stems directly from imaging results. We elucidate the interface-controlled nature of the single-grain growth in thin films and reveal the surface strains which may be a driving force for anisotropic crystallization rates. Our results bring in situ imaging with coherent X-rays towards understanding and controlling the crystallization processes of transparent conductive oxides and other polycrystalline materials at the nanoscale.

Free carriers in nanocrystalline titanium dioxide thin films

Simon Springer

This thesis analyzes the properties of heavily doped nanocrystalline titanium dioxide. Thin films were deposited by magnetron sputtering with either water vapor as reactive gas or a periodically interrupted oxygen supply. The samples were at the same time electrically conducting and transparent. They consisted of mixtures of rutile, anatase and amorphous phases. Titanium dioxide is chemically stable, hard, non-toxic, transparent, and inexpensive. Due to a high refractive index it is often found in optical applications as a thin film coating. For many purposes it is interesting to take advantage of a combination of good transparency and electrical conductivity. An even larger field of applications would open if the electric conductivity of TiO2 could be increased in a controlled manner. Conventional bulk doping is limited, however, by low solubility limits. Highly conducting nanocrystalline TiO2 thin films have been obtained recently by sputtering in presence of water vapor. The present project intends to elucidate the doping mechanisms at work in such films. In addition, an alternative process to achieve grain-boundary doping of TiO2 was explored. Spectrophotometry over a wide spectral range (0.05 to 5 eV) was the main tool in probing the mobile electrical charge carriers. The interpretation of these optical measurements required appropriate models. The models developed took many structural properties into account, such as thickness, surface roughness, density, anisotropy and crystalline phase composition. The phase and morphology of the films were analyzed by X-ray diffraction and reflection, scanning probe microscopy, and electron microscopy. The chemical analyses included electron-probe microanalyses, Rutherford backscattering and elastic recoil detection analysis. The DC electrical properties were measured between room temperature and 250 °C. Most water-deposited samples showed semiconducting behavior with an activation energy of the order of 100 meV. The optical measurements revealed a broad absorption band around 1 eV. The absorption coefficient scaled with conductivity. It was successfully modelled as a Lorentzian. Similar absorption bands have been reported for reduced rutile and anatase single crystals. Water-deposited samples containing anatase exhibited a metallic behavior. In these samples the thermal activation energy was reduced to about 30 meV and the charge carriers displayed a high mobility (3 cm2V-1s-1). The infrared absorption band was about 10 times less important than in the samples devoid of anatase. Thin films of TiO2 intercalated with the equivalent of nanometer-thick layers of Ti were prepared. By changing the period in the oxygen supply the grain size, and thereby the film properties, could be modified. The films obtained in this way had many properties in common with water-deposited films. They showed the same absorption band in the infrared, had comparable charge carrier densities and were electrically conductive (102 to 104 Sm-1 at room temperature). To our knowledge, this was the first time that such high electrical conductivities were achieved by sputtering in an oxygen plasma.

EPFL2004

Texture change through film thickness and off-axis accommodation of (002) planes

Alireza Karimi, Akshath Raghu Shetty

We present our recent experimental results on the formation of off-axis texture and crystallographic tilting of crystallites that take place in thin film of transition metal nitrides. For this purpose, the microstructural development of TiAlN film was studied, specially the change in texture with film thickness. Fiber texture was measured using theta-2 theta and pole figure X-ray diffraction (XRD), while scanning electron microscopy (SEM) and transmission electron microscopy (TEM) were used to observe the microstructure and changes in texture with thickness. The sin(2)psi method was applied to determine the stresses on (1 1 1) and (0 0 2) plane. With deposition parameters chosen, the growth texture mechanism is discussed in three different stages of film growth. Surface energy minimization at low thickness leads to the development of (0 0 2) orientation. On the other hand, the competitive growth promotes the growth of (1 1 1) planes parallel to film surface at higher thickness. However, contrary to the prediction of growth models, the (0 0 2) grains are not completely overlapped by (1 1 1) grains at higher thickness. Rather the (0 0 2) grains still constitute the surface, but are tilted away from the substrate normal showing substantial in-plane alignment to allow the (1 1 1) planes remain parallel to film surface. Intrinsic stress along (1 1 1) and (0 0 2) shows a strong dependence with preferred orientation. The stress level in (0 0 2) grains which was compressive at low thickness changes to tensile at higher thickness. This change in the nature of stress allows the (0 0 2) planes to tilt away in order to promote the growth of (111) parallel to film normal and to minimize the overall energy of system due to high compressive stress stored in the (1 1 1) grains. The change in surface morphology with thickness was observed using SEM. An increase in surface roughness with film thickness was observed which indicates the development of (1 1 1) texture parallel to film surface. TEM observations support the XRD results regarding texture change. Film hardness was measured by nanoindentation and a correlation between (1 1 1) texture, stress and hardness is obtained. The results indicate that texture development is a complex interplay between thermodynamic and kinetic forces. An attempt is made to understand this phenomenon of off-axis accommodation of (0 0 2) at higher thicknesses, which is a new result not reported previously. (C) 2011 Elsevier B.V. All rights reserved.

2011

Electron probing of oxygen-evolving oxide catalysts

Tzu-Hsien Shen

Water splitting is one of the cleanest ways to store energy. The production of hydrogen and oxygen gases can be utilized in fuel cells to generate electricity, power, and heat. In the water splitting process, the oxygen evolution reaction (OER), taking place at the anode, is the sluggish reaction limiting the efficiency. Electrocatalysts are used to reduce the kinetic barrier of OER. Development of high-performance and stable OER catalysts requires fundamental understanding of their electrocatalytic properties and, hence, their holistic characterization is indispensable. The objective of this thesis is to probe Co-based oxide catalysts for OER in an alkaline medium using advanced (scanning) transmission electron microscopy ((S)TEM) techniques. Starting with the surface characterization of a highly active OER oxide catalyst, Ba0.5Sr0.5Co0.8Fe0.2O3-d (BSCF), it is shown that the surfaces of the as-synthesized BSCF particles are Co/Fe rich and adopt a spinel-like structure with a reduced valence of Co ions. The Co/Fe spinel structure is further linked to the formation of the highly active Co(Fe)OOH at the BSCF surface. Further real-time probing of BSCF oxide catalysts using electrochemical liquid-cell TEM shows a switchable wetting behavior of Co-based oxide catalysts by analyzing the liquid movement around oxide particles. The interfacial interactions at the surface-electrolyte under potential cycling are correlated to electrowetting and hydrophilic surface transformation. Molecular oxygen evolution is detected qualitatively under OER conditions by identifying the O2 feature in electron energy-loss spectra. Quantification of the O2 using electron energy-loss spectroscopy is also demonstrated, pending further improvements.The work herein offers new insights into the characterization framework of oxide catalysts for OER using (S)TEM. The bulk to surface structure of the catalysts can be analyzed, and the interfacial interactions of single-particle catalysts can be probed in real-time. The findings aid in understanding the performance and stability of oxygen-evolving oxide catalysts with further prospects envisioned towards a complete quantitative probing of electrocatalytic reactions in real-time. Ultimately, quantitative characterization in electrochemical liquid-phase (S)TEM can provide understanding of surface-active sites and reaction kinetics of oxygen evolution catalysts.

EPFL2022