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Optimization of Edge Profile for Improved Anti-Resonance Quality Factor in Lithium Niobate SH0 Resonators

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A formula for the admittance of laterally excited bulk wave resonators (XBARs)

Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli, Victor Plessky

The recently invented laterally excited bulk wave resonators (XBARs) demonstrate outstanding parameters suitable for the design of low loss filters for the fifth generation of mobile phones. The operation of XBARs can be interpreted as an excitation of ant ...

WILEY2021

Unconventional time-bandwidth performance of resonant cavities with nonreciprocal coupling

Camille Sophie Brès, Davide Grassani, Ivan Cardea, Kosmas Tsakmakidis

The time-bandwidth limit is a mathematical tenet that affects all reciprocal resonators, stating that the product of the spectral bandwidth that can couple into a resonant system and its characteristic energy decay time is always equal to 1. Here, we devel ...

2021

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Self-similar structures occur naturally and have been employed to engineer exotic physical properties. We show that acoustic modes of a fractal-like system of tensioned strings can display increased mechanical quality factors due to the enhancement of diss ...

AMER PHYSICAL SOC2020

Bioresorbable implantable medical devices show great potential for applications requiring medical care over well-defined periods of time. Such implants naturally degrade and resorb in the body, which eliminates adverse long-term effects or the need for a s ...

EPFL2020

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Suspended nanochannel resonators (SNRs) are promising devices able to characterize mass down to the attogram scale, thus being able to detect nanoparticles or biomolecules. In this paper, we present a flexible fabrication process for SNRs based on a sacrif ...

ELSEVIER2020

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This work presents the fabrication of a MEMS resonant device which addresses the need for high quality and miniaturized RF filters in the 3-6 GHz range for 5th generation (5G) mobile networks. The 4-mask fabrication process is based on the definition of in ...

IEEE2019

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Lamb wave microresonators with wavelengths of 5-8m, vibrating in the S0 mode, and having 75 electrode pairs were fabricated and characterized. The results were compared to theoretical predictions obtained by finite element simulation. The active material w ...

AMER INST PHYSICS2019

Miniaturization is a simple yet very powerful concept. Applied to devices, it opens to plethora of new applications. Microelectromechanical systems (MEMS) are the result of scaling down the dimensions of devices to the micron range or the nano range (NEMS) ...

EPFL2019

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A suspended 400nm thin mono-crystalline ZY cut Lithium Niobate (LN) membrane with narrow interdigital electrodes (IDEs) on top having a pitch of the order of few microns excites standing shear bulk acoustic wave resonance (XBAR) within the membrane through ...

IEEE2019

Active Electroacoustic Resonators and their Applications to Non-Hermitian Acoustics

Romain Christophe Rémy Fleury

We will discuss our recent experimental progress on developing active acoustic resonators that provide in- dependently tunable acoustic properties, namely the possibility to control at will their resonance frequency, absorption losses, and radiative losses ...

2019