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Dynamic control of high-voltage actuator arrays by light-pattern projection on photoconductive switches

Related publications (37)

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Top-Down Fabrication of Silicon Nanowires in Ultra-deep Trenches

Georg Fantner, Davide Sacchetto, Yusuf Leblebici, Oliver Peric, Zuhal Tasdemir

One-Dimensional (1D) nanostructures have gained a considerable attention in the field of semiconductor technology for the past several decades. With the help of rapid development in the process technology, it becomes possible to scale these nanostructures ...

2014

Optical Modulators Based on Microfabricated Tilting Flaps Operating at low Actuation Voltages

Fabio Jutzi

In this thesis the concept, modelling, design, fabrication process and characterization of novel optical modulators are presented. The devices consist of flaps exhibiting a large tilt with electrostatic actuation at low voltages. The applications comprise, ...

EPFL2012

3D Integration Technology for Lab-on-a-Chip Applications

Yüksel Temiz

This study adds a new dimension to lab-on-a-chip systems by employing three-dimensional (3D) integration technology for improved performance, higher functionality, and on-chip computational power. Despite the extensive amount of current research on 3D memo ...

EPFL2012

Configuration of control system for damage tolerance of a tensegrity bridge

Ian Smith, Nizar Bel Hadj Ali, Sinan Korkmaz

Tensegrity structures are spatial, discrete, and lightweight structures that are composed of struts in compression and pre-stressed cables. Stability is provided by the self-stress state between elements independently of external actions. Tensegrity struct ...

Elsevier2012

Dielectric Elastomer Actuators for Microfluidics

Herbert Shea, Samuel Rosset, Luc Maffli

One of the goals of microfluidics is to bring a whole laboratory processing chain on a few square centimeters, Lab-On-Chips (LOC). But current LOCs require many heavy and power-consuming off-chip controls like pneumatics, pumps and valves, which keep the s ...

2012

Multilayer Dielectric Elastomer Actuators with Ion Implanted Electrodes

Herbert Shea, Muhamed Niklaus, Samin Akbari

We present the design, fabrication process and characterization of multilayer miniaturized polydimethylsiloxane (PDMS)-based dielectric elastomer diaphragm actuators. The conductive stretchable electrodes are obtained by lowenergy metal ion implantation. T ...

Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2011

In-IC Strategies for 3D Devices in Bulk Silicon

Matthieu Bopp

The increase of components density in advanced microelectronics is practically dictated by the device size and the achievable pitch between the devices. Scaling down dimensions of devices and progress in the circuit design allowed following Moore's law dur ...

EPFL2011

Design, Optimization, and Sensorless Control of a Linear Actuator

Joël Maridor

Electrical contactors are relays for interputing high currents (up to 2000 A). They consist of three main distinct parts: the low voltage circuit, the high voltage circuit and the linear actuator that moves the contact. The purpose of this thesis is to des ...

EPFL2011

MEMS-based programmable reflective slit mask for multi-object spectroscopy

Nico de Rooij, Michael David Canonica, Wilfried Noell

Multi-object spectroscopy is a powerful tool for space and ground-based telescopes for the study of the formation of galaxies. This technique requires a programmable slit mask for astronomical object selection. We are developing MEMS-based programmable ref ...

Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2011

Reliable MEMS Actuators for Driving Large Microsystems

Nicolas Bernard Golay

Nowadays many consumer electronic devices are using small engines (micromotors). Thanks to technological innovation, the components can be imbedded into numerous portable systems. The key factors for a nomadic integration are: reduction of power consumptio ...

EPFL2010