Evaporation (deposition)Evaporation is a common method of thin-film deposition. The source material is evaporated in a vacuum. The vacuum allows vapor particles to travel directly to the target object (substrate), where they condense back to a solid state. Evaporation is used in microfabrication, and to make macro-scale products such as metallized plastic film. Evaporation involves two basic processes: a hot source material evaporates and condenses on the substrate. It resembles the familiar process by which liquid water appears on the lid of a boiling pot.
Particle beamA particle beam is a stream of charged or neutral particles. In particle accelerators, these particles can move with a velocity close to the speed of light. There is a difference between the creation and control of charged particle beams and neutral particle beams, as only the first type can be manipulated to a sufficient extent by devices based on electromagnetism. The manipulation and diagnostics of charged particle beams at high kinetic energies using particle accelerators are main topics of accelerator physics.
Charged particle beamA charged particle beam is a spatially localized group of electrically charged particles that have approximately the same position, kinetic energy (resulting in the same velocity), and direction. The kinetic energies of the particles are much larger than the energies of particles at ambient temperature. The high energy and directionality of charged particle beams make them useful for many applications in particle physics (see Particle beam#Applications and Electron-beam technology).
Ion sourceAn ion source is a device that creates atomic and molecular ions. Ion sources are used to form ions for mass spectrometers, optical emission spectrometers, particle accelerators, ion implanters and ion engines. Electron ionization Electron ionization is widely used in mass spectrometry, particularly for organic molecules. The gas phase reaction producing electron ionization is M{} + e^- -> M^{+\bullet}{} + 2e^- where M is the atom or molecule being ionized, e^- is the electron, and M^{+\bullet} is the resulting ion.
PaperPaper is a thin sheet material produced by mechanically or chemically processing cellulose fibres derived from wood, rags, grasses, or other vegetable sources in water, draining the water through a fine mesh leaving the fibre evenly distributed on the surface, followed by pressing and drying. Although paper was originally made in single sheets by hand, almost all is now made on large machines—some making reels 10 metres wide, running at 2,000 metres per minute and up to 600,000 tonnes a year.
Hall-effect thrusterIn spacecraft propulsion, a Hall-effect thruster (HET) is a type of ion thruster in which the propellant is accelerated by an electric field. Hall-effect thrusters (based on the discovery by Edwin Hall) are sometimes referred to as Hall thrusters or Hall-current thrusters. Hall-effect thrusters use a magnetic field to limit the electrons' axial motion and then use them to ionize propellant, efficiently accelerate the ions to produce thrust, and neutralize the ions in the plume.
Plasma-facing materialIn nuclear fusion power research, the plasma-facing material (or materials) (PFM) is any material used to construct the plasma-facing components (PFC), those components exposed to the plasma within which nuclear fusion occurs, and particularly the material used for the lining the first wall or divertor region of the reactor vessel. Plasma-facing materials for fusion reactor designs must support the overall steps for energy generation, these include: Generating heat through fusion, Capturing heat in the first wall, Transferring heat at a faster rate than capturing heat.
Plasma etchingPlasma etching is a form of plasma processing used to fabricate integrated circuits. It involves a high-speed stream of glow discharge (plasma) of an appropriate gas mixture being shot (in pulses) at a sample. The plasma source, known as etch species, can be either charged (ions) or neutral (atoms and radicals). During the process, the plasma generates volatile etch products at room temperature from the chemical reactions between the elements of the material etched and the reactive species generated by the plasma.
Mass spectrometryMass spectrometry (MS) is an analytical technique that is used to measure the mass-to-charge ratio of ions. The results are presented as a mass spectrum, a plot of intensity as a function of the mass-to-charge ratio. Mass spectrometry is used in many different fields and is applied to pure samples as well as complex mixtures. A mass spectrum is a type of plot of the ion signal as a function of the mass-to-charge ratio.
Plasma (physics)Plasma () is one of four fundamental states of matter, characterized by the presence of a significant portion of charged particles in any combination of ions or electrons. It is the most abundant form of ordinary matter in the universe, being mostly associated with stars, including the Sun. Extending to the rarefied intracluster medium and possibly to intergalactic regions, plasma can be artificially generated by heating a neutral gas or subjecting it to a strong electromagnetic field.
