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Multilayered niobium oxynitride films were deposited onto (100) Si using DC magnetron sputtering with a reactive gas pulsing process. The argon and nitrogen flows were kept constant during sputtering of a pure niobium target and the oxygen flow was pulsed ...
We report on the fabrication and characterization of high performance nanowire superconducting single photon detectors (SSPD) on MgO substrates. The deposition of the superconducting material (NbN) has been performed by magnetron sputtering at 400C. This d ...
Nanowire superconducting single photon detectors (SSPDs) [1] are characterized by very high sensitivity in the near infrared (detection efficiency η up to 30%, for a dark count rate DK of few Hz), speed (up to ∼1 GHz repetition rate) and time resolution (j ...
Laser photoablation of poly(ethylene terephthalate) (PET), a flexible dielectric organic polymer, was used to design an acoustic miniaturized DNA biosensor. The microchip device includes a 100-μm-thick PET layer, with two microband electrodes patterned in ...
Focused electron- and ion-beam induced processing are well established techniques for local deposition and etching that rely on decomposition of precursor molecules by irradiation. These high-resolution nanostructuring techniques have various applications ...
Syntheses of ZSM-5 coatings on stainless steel plates were carried out via the substrate heating method. The reaction mixture was kept at temperatures below 100 °C, while the metal plates were heated to temperatures above 100 °C. It was demonstrated that c ...
Process optimization and properties of lead zirconate titanate (PZT) films for piezoelectric micromachined ultrasonic transducers (pMUTs) for scanning probe devices will be presented. The goal of the work was a replacement of the tetragenic and mutagenic s ...
This work presents the preliminary results on application of mineral sacrificial layer that is prepared to structure LTCC (low temperature co-fired ceramic). The proposed method suggests utilization of a sacrificial paste, which remains "permanent" during ...
We present a unique probe that is based on a quartz tuning fork and a microfabricated cantilever. The probe is self-actuating and self-sensing. The cantilever can be tailored to the needs of specific applications, in this case to feature an electrically co ...
A quartz tuning-fork (TF)-based scanning probe is presented for local electrical transport measurements on quantum devices below the liquid 4He temperature. The TF is utilized to drive and sense the mechanical oscillation of an attached, microfabricated ca ...
