Herbert Shea, Joao Gomes Pereira Junior
We report on a study of the sensitivity of silicon MEMS to proton radiation and mitigation strategies. MEMS systems can degrade due to ionizing radiation (electron-hole pair creation) and non-ionizing radiation (displacement damage), such as electrons, tra ...
Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2011