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NbN films with high kinetic inductance for high-quality compact superconducting resonators

Related publications (42)

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Room-temperature quantum optomechanics using an ultralow noise cavity

Tobias Kippenberg, Guanhao Huang, Alberto Beccari, Nils Johan Engelsen

At room temperature, mechanical motion driven by the quantum backaction of light has been observed only in pioneering experiments in which an optical restoring force controls the oscillator stiffness1,2. For solid-state mechanical resonators in which oscil ...

Berlin2024

Ultrahigh-quality-factor micro- and nanomechanical resonators using dissipation dilution

Tobias Kippenberg, Alberto Beccari, Nils Johan Engelsen

Mechanical resonators are widely used in sensors, transducers and optomechanical systems, where mechanical dissipation sets the ultimate limit to performance. Over the past 15 years, the quality factors in strained mechanical resonators have increased by f ...

Berlin2024

Metasurface-stabilized optical microcavities

Ileana-Cristina Benea-Chelmus

Cavities concentrate light and enhance its interaction with matter. Confining to microscopic volumes is necessary for many applications but space constraints in such cavities limit the design freedom. Here we demonstrate stable optical microcavities by cou ...

NATURE PORTFOLIO2023

Fields of technology as diverse as microwave filter construction, characterization of material interfaces with atomic precision, and detection of gravitational waves from astronomical sources employ mechanical resonators at their core. The utility of mecha ...

EPFL2023

Optimization of Edge Profile for Improved Anti-Resonance Quality Factor in Lithium Niobate SH0 Resonators

Luis Guillermo Villanueva Torrijo, Silvan Stettler

Thin-film lithium niobate (LNO) has been identified as a promising material platform for enabling high electromechanical coupling and low-loss piezoelectric resonators for filtering applications. In this work, the design and fabrication of fundamental shea ...

IEEE2022

Collective dynamics in nonlinear resonators coupled in spatial and synthetic dimensions

Tobias Kippenberg, Aleksandr Tusnin, Alexey Tikan

We theoretically investigate chaotic and stable structures in coupled-resonator chains and synthetic frequency dimension influenced by Kerr nonlinearity, thereby bringing insights in the emerging field of soliton generation in chains and lattices of high-Q ...

IEEE2021

Fractal-like Mechanical Resonators with a Soft-Clamped Fundamental Mode

Tobias Kippenberg, Alberto Beccari, Nils Johan Engelsen, Sergey Fedorov

Self-similar structures occur naturally and have been employed to engineer exotic physical properties. We show that acoustic modes of a fractal-like system of tensioned strings can display increased mechanical quality factors due to the enhancement of diss ...

AMER PHYSICAL SOC2020

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Lamb wave microresonators with wavelengths of 5-8m, vibrating in the S0 mode, and having 75 electrode pairs were fabricated and characterized. The results were compared to theoretical predictions obtained by finite element simulation. The active material w ...

AMER INST PHYSICS2019

Circuit Quantum Electrodynamics with superconductor-semiconductor hybrid systems

Pasquale Scarlino, Jann Hinnerk Ungerer

Semiconductor qubits rely on the control of charge and spin degrees of freedom of electrons or holes confined in quantum dots (QDs). Typically, semiconductor qubit-qubit coupling is short range, effectively limiting qubit distance to the spatial extent of ...

2019

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This work presents the fabrication of a MEMS resonant device which addresses the need for high quality and miniaturized RF filters in the 3-6 GHz range for 5th generation (5G) mobile networks. The 4-mask fabrication process is based on the definition of in ...

IEEE2019