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Ultrahigh-quality-factor micro- and nanomechanical resonators using dissipation dilution

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Reduced material loss in thin-film lithium niobate waveguides

Tobias Kippenberg, Guanhao Huang, Mikhail Churaev, Zihan Li, Di Zhu

Thin-film lithium niobate has shown promise for scalable applications ranging from single-photon sources to high-bandwidth data communication systems. Realization of the next generation high-performance classical and quantum devices, however, requires much ...

AIP Publishing2022

Hierarchical tensile structures with ultralow mechanical dissipation

Tobias Kippenberg, Alberto Beccari, Amirali Arabmoheghi, Nils Johan Engelsen, Sergey Fedorov

Structural hierarchy is found in myriad biological systems and has improved man-made structures ranging from the Eiffel tower to optical cavities. In mechanical resonators whose rigidity is provided by static tension, structural hierarchy can reduce the di ...

NATURE PORTFOLIO2022

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Self-similar structures occur naturally and have been employed to engineer exotic physical properties. We show that acoustic modes of a fractal-like system of tensioned strings can display increased mechanical quality factors due to the enhancement of diss ...

AMER PHYSICAL SOC2020

Generalized dissipation dilution in strained mechanical resonators

Tobias Kippenberg, Dalziel Joseph Wilson, Nils Johan Engelsen, Sergey Fedorov, Ryan Daniel Schilling, Amir Hossein Ghadimi

Mechanical resonators with high quality factors are widely used in precision experiments, ranging from gravitational wave detection and force sensing to quantum optomechanics. Beams and membranes are well known to exhibit flexural modes with enhanced quali ...

AMER PHYSICAL SOC2019

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Stressed nanomechanical resonators are known to have exceptionally high quality factors (Q) due to the dilution of intrinsic dissipation by stress. Typically, the amount of dissipation dilution and thus the resonator Q is limited by the high mode curvature ...

AMER CHEMICAL SOC2019

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Lamb wave microresonators with wavelengths of 5-8m, vibrating in the S0 mode, and having 75 electrode pairs were fabricated and characterized. The results were compared to theoretical predictions obtained by finite element simulation. The active material w ...

AMER INST PHYSICS2019

Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Soumya Yandrapalli, Victor Plessky, Muhammad Faizan

This work presents the fabrication of a MEMS resonant device which addresses the need for high quality and miniaturized RF filters in the 3-6 GHz range for 5th generation (5G) mobile networks. The 4-mask fabrication process is based on the definition of in ...

IEEE2019

Context-based Quality of Experience in Immersive Multimedia

Anne-Flore Nicole Marie Perrin

Since 1895, when the Lumière brothers came out with the projected cinematograph, motion pictures and more generally multimedia contents have considerably improved and are still experiencing a very dynamic development. Advances involved improving various mo ...

EPFL2019

A second harmonic based resonance characterization method for MEMS electrostatic resonators

Mustafa Kangül, Ozge Zorlu, Furkan Gökçe, Eren Aydin

This paper presents a novel read-out approach both for eliminating parasitic feedthrough current and for enhancing the quality-factor (Q) of the resonating system at the same time. A new resonance characterization method based on sensing second harmonic co ...

ELSEVIER SCIENCE SA2018

Piezoelectric Nano-Balance for RNA Detection

Vesna Bacheva

Mass sensors, such as contour mode resonators are promising approach for biosensing in liquid environment. Their miniaturization offers many advantages, including small sample volume, rapid analysis, low power consumption, and integration of multiple devic ...

2017