Publication

Microfabrication d'objets composites fonctionnels en 3D et à haut facteur de forme, par procédés UV-LIGA et microstéréolithographie

Related publications (52)

Multiscale 2D/3D microshaping of property-contrast polymer-derived SiCN

Jürgen Brugger, Lorenz Hagelüken

Polymer-derived ceramics are a unique class of materials known for their outstanding properties and versatile applicability. The liquid nature of the precursors allows easy addition of fillers in order to alter the resulting ceramics’ properties. We use a ...
2022

Volumetric Additive Manufactuing of Ceramics

Christophe Moser, Paul Delrot, Jorge Andres Madrid Wolff, Damien Claude-Marie Loterie, Georgia Konstantinou

Two-photon additive manufacturing of ceramic materials has demon-strated high-precision manufacturing of tools at the micrometer scale. Here, we propose single photon volumetric additive manufacturing toovercome limitations on print size and which avoid th ...
IEEE2021

Simulation of silicon KOH and dry etching methods for micromould fabrication

Laurène Tribolet

The purpose of this project is to investigate the suitability of wet etching methods such as KOH etching for silicon micromoulds fabrication. Those moulds are intended for preceramic polymer (PCP) casting and specific requirements regarding the profile of ...
2020

Additive micro-manufacturing of crack-free PDCs by two-photon polymerization of a single, low-shrinkage preceramic resin

Jürgen Brugger, Demetri Psaltis, Christophe Moser, Helena Van Swygenhoven, Eirini Kakkava, Lorenz Hagelüken, Georgia Konstantinou, Nikolaos Nianias, Jieping Wang

Additive manufacturing (AM) methods are being integrated in ceramics fabrication either as the main manufacturing tool or for auxiliary purposes. By using polymers, powders and preceramic formulated materials, AM techniques are pushing towards higher resol ...
2020

Microstereolithography

Philippe Renaud, Arnaud Bertsch

Microstereolithography is a 3D microfabrication technology that is fundamentally different from the techniques commonly used in cleanroom environment for the manufacturing of MEMS components. Most microfabrication techniques evolved from the microelectroni ...
Elsevier / William Andrew Publishing2019

Microfluidic Scintillation Detectors for High Energy Physics

Pietro Maoddi

This thesis deals with the development and study of microfluidic scintillation detectors, a technology of recent introduction for the detection of high energy particles. Most of the interest for such devices comes from the use of a liquid scintillator, whi ...
EPFL2015

Microstereolithography

Philippe Renaud, Arnaud Bertsch

Microstereolithography is a 3D microfabrication technology that is fundamentally different from the techniques commonly used in cleanroom environment for the manufacturing of microelectromechanical system (MEMS) components. Most microfabrication techniques ...
Elsevier2015

Surface 3D Micro Free Forms: Multifunctional Microstructured Mesoporous alpha-Alumina by in Situ Slip Casting Using Excimer Laser Ablated Polycarbonate Molds

Paul Bowen, Patrik Willi Hoffmann, Sriharitha Rowthu

Ceramic surface microstructuring is a rapidly growing field with a variety of applications in tribology, wetting, biology, and so on. However, there are limitations to large-area microstructuring and fabrication of three-dimensional (3D) micro free forms. ...
Amer Chemical Soc2015

Measuring the local strength of alumina reinforcements

Andreas Mortensen, Marco Cantoni, Goran Zagar, Andreas Rossoll, Martin Guillermo Mueller, Václav Pejchal

Ceramic particles in metal matrix composites, or hard second phases in alloys, often serve as reinforcements, raising its stiffness, hardness and strength. Their efficiency depends on their strength, a quantity that is statistically distributed over micros ...
2014

Influence of carbon enrichment on electrical conductivity and processing of polycarbosilane derived ceramic for MEMS applications

Jürgen Brugger, Rosario Maurizio Gullo, Jonas Grossenbacher, Markus Niederberger

An analysis about the effect of carbon enrichment of allylhydridopolycarbosilane SMP10® with divinylbenzene (DVB) as a promising material for electrical conductive micro-electrical mechanical systems (MEMS) is presented. The liquid precursors can be microp ...
Elsevier Sci Ltd2014

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