Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications
Related publications (35)
Graph Chatbot
Chat with Graph Search
Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.
DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.
Cantilever-based detection of ultrasmall forces is of great interest for several applications such as magnetic resonance force miscroscopy (MRFM) where an ultrahigh sensitive cantilever is used to detect magnetic resonance in small ensembles of electron or ...
The invention relates to a Stick-Slip piezoelectric actuator comprising a piezoelectric element with active zones and passive zones, said active zones being transversally deformable by applying different voltages, said passive zones not being actively defo ...
Piezoelectric motors (usually called ultrasonic) show interesting characteristics. Not only they deliver high torques at low speeds but their structure confers to them a braking torque without energy supply. This paper firstly present a list of possible so ...
A micromotor for low power applications is being developed using silicon micromachining technologies and organometallic PZT films sol-gel deposition. The construction of a hybrid ultrasonic motor suitable for batch fabrication is proposed. A fabrication pr ...
We report on recent advances in micro fabrication technology using micromoulding and high-aspect ratio structuring of photopolymer. The direct application is the realization of components for millimeter-size, ultrasonic piezoelectric motors. A new fabricat ...