Publication
A micromotor for low power applications is being developed using silicon micromachining technologies and organometallic PZT films sol-gel deposition. The construction of a hybrid ultrasonic motor suitable for batch fabrication is proposed. A fabrication process for the stator resonator compatible with both bulk micromachining and 0.3 mu m PZT films deposition on a SiNx/Ta/Pt substrate has been tested. Comparison of PZT actuated and previously fabricated ZnO actuated diaphragms are performed using laser interferometry, PZT samples show promising results for applications where a low voltage operation is a key benefit. Poled PZT films are obtained after process completion and influence of DC biases on the resonance frequencies are observed.
Paul Muralt, Ramin Matloub Aghdam, Andrea Mazzalai, Nachiappan Chidambaram, Davide Balma