A ball valve micropump in glass fabricated by powder blasting
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We present the design, fabrication process and characterization of multilayer miniaturized polydimethylsiloxane (PDMS)-based dielectric elastomer diaphragm actuators. The conductive stretchable electrodes are obtained by lowenergy metal ion implantation. T ...
Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2011
We report on a high-efficiency and self-priming active-valve micropump consisting of a microfluidic chamber structure in glass that is assembled with a polydimethylsiloxane (PDMS) elastic sheet. The latter comprises two valving membranes and a central pump ...
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Dielectric minimum energy structures are capable of large actuation stroke, and consist of a pre-stretched dielectric elastomer actuator (DEA) laminated onto a flexible frame, which makes it easy to obtain both simple and complex shapes. We report here on ...
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Micronozzles with piezoelectric actuator were fabricated and investigated. The micronozzles were fabricated in glass substrates using a powderblasting technique, and the actuator is a bimorph structure made from a piezoelectric polymer. The actuator was lo ...
This thesis presents the design and microfabrication technology of a tip-tilt, 2 degree of freedom "mirror system" made out of Silicon On Insulator (SOI) wafers with two movable mirrors that have diameter of 10 mm. The system was intended for precise beam ...
We report on the fabrication and characterization of 2x2 arrays of mm-diameter PDMS lenses whose focal length can be electrically tuned. Dielectric elastomer actuators generally rely on carbon powder or carbon grease electrodes, which are not transparent, ...
Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2010
The goal of the project is to explore the possibility of controlling the speed of the actuator’s moving part without using any sensor. The speed has to be set accordingly to the position of the moving part at specific time. This dependency is fixed and is ...
