Preparation of SnO2-Sb2O5 films by the spray pyrolysis technique

Spray pyrolysis has been widely used for the prepn. of thin (.apprx.0.1 mm) and transparent SnO2 films on glass substrates. The parameters of the spray pyrolysis for the prepn. of thick SnO2-Sb2O5 conductive films on Ti substrates were studied for electrochem. use. The resistivity of the films exhibits a min. for a Sb concn. of .apprx.3 at.% (precursor soln. concn.) and for a prepn. temp. of 550 Deg. As far as the compn. is concerned, the Sb concn. in the oxide films is about twice as large as that in the corresponding precursor soln. The dependence of the oxide loading on the substrate temp. and nature and the influence of the spray conditions also are discussed. [on SciFinder (R)]