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Flexural-standing-wave elastic force motor using ZnO and PZT thin film on micromachined silicon membranes for wristwatch applications

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Piezoelectric membranes consisting of PbZrxTi1-xO3 (PZT) films on silicon diaphragms have been fabricated, investigated, and applied for micromotors. The PZT films were deposited by sputtering and sol gel techniques. Resonance amplitudes of up to 1000 nm/V ...

Taylor & Francis1995

PZT films for micro-pumps

Nava Setter, Dragan Damjanovic, Georges-André Racine

A micro-pump for medical applications is being developed using organometallic derived PZT thin films and silicon micromachining technology. Critical issues include the deposition of 'thick' PZT films (1 to 2 mu m thickness), film processing compatibility w ...

1995

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For the first time we have characterized a micromotor driven by a piezoelectric PZT (PbZrxTi1-xO3) thin film. Sputter and sol-gel techniques have been applied for the deposition of the PZT films onto a silicon stator membrane, which is 20-30 mu m thick and ...

Elsevier1995

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For micromechanical applications, piezoelectric PbZrTO3 (PZT) thin films have been deposited on metallised Si3N4/SiO2 layers on Si wafers. Films with compositions near the morphotropic phase boundary (x=0.53) were prepared at 600°C using a multitarget, in- ...

The Institute of Materials / Maney Publishing1995

Hybrid ultrasonic elastic force motors micromachined in silicon

Nava Setter, Georges-André Racine

A micromotor for low power applications is being developed using silicon micromachining technologies and organometallic PZT films sol-gel deposition. The construction of a hybrid ultrasonic motor suitable for batch fabrication is proposed. A fabrication pr ...

1995

Properties of Piezoelectric Pzt Thin Films for Microactuator Applications

Nava Setter, Paul Muralt, Dragan Damjanovic, Thomas Maeder

The piezoelectric properties of lead zirconate titanate (PZT) thin ﬁlms deposited on thick silicon substrates and thin silicon membranes were investigated using optical interferometry. The effect of the geometrical constraints and clamping effects on the p ...

1994

Use of Transmission Electron-Microscopy for the Characterization of Rapid Thermally Annealed, Solution-Gel, Lead-Zirconate-Titanate Films

Nava Setter

The microstructure and preferred orientations of rapid thermally annealed Pb(Zr0.53, Ti0.47)O3 films, deposited on Pt/Ti/SiO2/Si electrode/substrates by solution-gel spinning, have been investigated using analytical and high-resolution electron microscopy ...

1994