Thin film pyroelectric array as a detector for an infrared gas spectrometer
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The mid-infrared range is of interest in spectroscopic applications, due to the large number of organic compounds that exhibit characteristic absorption bands in this spectral region. Semiconductor technology, however, has been developed mainly for the nea ...
Spatial representativeness is an important quality criterion in trace gas monitoring, especially if measurements are intended for regulatory and model validation purposes. Open-path absorption spectroscopy techniques meet the representativeness requirement ...
Infrared spectroscopy using semiconductor lasers is a promising technique for trace gas detection. It allows a continuous and real time monitoring of several species, with a high sensitivity and a good selectivity. Among all the possible methods two are pa ...
The main topic of this thesis is the fabrication and characterization of structures smaller than the wavelength of light, for operation in the visible or near infrared spectral range. In the first part of this thesis, the fabrication of periodic structures ...
We present a MEMS infrared spectrometer for selective and quantitative chemical gas analysis. infrared absorption spectroscopy can distinguish gases easily and also detect nonreactive molecules like CO2, in contrast to e.g. metal oxide gas sensors The foll ...
Spectrometers are enjoying increasing popularity in bioprocess monitoring due to their non-invasiveness and in-situ sterilizability. Their on-line applicability and high measurement frequency create an interesting opportunity for process control and optimi ...
GaN/AlN quantum dots grown by molecular beam epitaxy either on silicon (111), sapphire or 6H-SiC (0001) substrate have been investigated using photoluminescence, cathodoluminescence, Fourier transform infrared spectroscopy and attenuated total reflection s ...
This paper presents continuative results on the design, fabrication and measurements of a vertically moving, electrostatically actuated micromirror, first shown at the IEEE MEMS 2007 [N. Quack, I. Züst, S. Blunier, J. Dual, M. Arnold, F. Felder, M. Rahim, ...
The state of the art of thin-film pyroelectric infrared (IR) detectors is reviewed covering device physics, material performance, micro-fabrication and device examples. Emphasis is given to special issues related to thin films, such as small heat capacitie ...
In this paper, the IrO2 electrode preparation technique consisting in thermal treatment of pure Ir in air was used in order to produce an IrO2-based microelectrode-array (TOIROF-MEA) with low capacitive background current. The TOIROF-MEA was characterized ...