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Micromachined infrared detectors based on pyroelectric thin films

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Phase transitions, anisotropy and domain engineering

Matthew Davis

Relaxor-ferroelectric single crystals PZN-xPT [(1-x)Pb(Zn1/3Nb2/3)O3-xPbTiO3] and PMN-xPT [(1-x)Pb(Mg1/3Nb2/3)O3-xPbTiO3] continue to attract much interest due to their anomalously large piezoelectric properties (d33 > 2000 pm/V; k33 > 90%) when poled ("do ...

EPFL2006

Ferroelectric and piezoelectric properties of lanthanoid-substituted Bi4Ti3O12 thin films grown on (111)Pt and (100)IrO2 electrodes

Nava Setter, Paul Muralt

We investigated he effect of film orientation on piezoelectric and ferroelectric properties of (Bi(3.25)Ln(0.75))Ti3O12 (Ln=La, Nd, and Sm). c-axis-oriented films were grown on (111)Pt electrodes with nondoped Bi4Ti3O12 buffer layers. The films grown on (1 ...

2005

Enhanced performance of pyroelectric microsensors through the introduction of nanoporosity

Nava Setter

Sol-gel process has successfully been applied for the deposition of porous PbZrxTi1-xO3 (x = 0.45, 0.15) thin films on platinized silicon wafers. Addition of a polymer as a volatile phase to the precursor sol prior to spin coating has been proved an excell ...

2004

Patterned and self-assembled ferroelectric nano-structures obtained by epitaxial growth and e-beam lithography

Simon Bühlmann

The continuous downscaling of microelectronic circuits combined with increasing interest in ferroelectric thin films for non-volatile random access memories (FeRAM) is drawing great attention to small ferroelectric thin film structures. There are various c ...

EPFL2004

Thin film piezoelectric materials offer a number of advantages in microelectromechanical systems (MEMS), due to the large motions that can be generated, often with low hysteresis, the high available energy densities, as well as high sensitivity sensors wit ...

2004

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Thin films of neodymium-modified bismuth titanate Bi3.44Nd0.56Ti3O12 (BNT) were grown on Pt/TiO2/SiO2/Si substrates using chemical solution deposition method. The capacitors made by applying top Au electrodes on BNT films showed significantly improved valu ...

2002

Ferroelectric thin films for micro-sensors and actuators: a review

Paul Muralt

This paper reviews deposition, integration. and device fabrication of ferroelectric PbZrxTi1-xO3 (PZT) films for applications in microelectromechanical systems. As examples, a piezoelectric ultrasonic micromotor and pyroelectric infrared detector array are ...

2000

Gas spectrometry based on a pyroelectric thin film array

Nava Setter, Paul Muralt

We present a far infrared gas spectrometer which uses a thin film pyroelectric detector integrated on silicon. The detector is in-house fabricated and consists of 1 x 50 elements of sol-gel deposited, zirconium rich lead titanate (PZT) which are suspended ...

1999

In-plane piezoelectric coefficient of PZT thin films as a function of composition

Paul Muralt, Stéphane Hiboux, Andreas Seifert, Nicolas Ledermann

The effective piezoelectric coefficient e(31) has been measured on sol-gel processed Pb(ZrxTi1-x)O-3 thin films with Zr concentrations ranging from 45 to 60%. The largest value was observed at 45% Zr, although dielectric constant and effective d(33) peak a ...

1999

Self-polarization effect in Pb(Zr,Ti)O-3 thin films

Nava Setter, Stéphane Hiboux

The self-polarization effect is investigated in Pb(Zr,Ti)O-3 (PZT) thin films deposited by sol-gel and magnetron sputtering techniques. The effective piezoelectric coefficient of as-grown films, which is proportional to their initial polarization (self-pol ...

1998