Processing optimization of solution derived PbZr1-xTixO3 thin films for piezoelectric applications
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Challenges in real-time process optimization mainly arise from the inability to build and adapt accurate models for complex physico-chemical processes. This paper surveys different ways of using measurements to compensate for model uncertainty in the conte ...
Just about every other technical publication you pick up these days makes sweeping statements concerning the pressures on scientists, engineers, and industries as a whole to get to market in less time, with an improved, less expensive product. I am reminde ...
Process optimization and properties of lead zirconate titanate (PZT) films for piezoelectric micromachined ultrasonic transducers (pMUTs) for scanning probe devices will be presented. The goal of the work was a replacement of the tetragenic and mutagenic s ...
Miniswys motor (property of Miniswys SA) is a piezoelectric, ultrasonic, linear motor intended to be integrated in an optical system for mobile phones. With the aim of continually optimizing their product, Miniswys SA has signed a collaboration agreement w ...
We report a recent breakthrough to control profile angle for SiO2 Deep Anisotropic Dry Etching (SDADE). Our study reveals that gas residence time is the key parameter to control profile angle. Moreover, we show that it is possible to control profile angle, ...
The CORBA Object Group Service (OGS) is a new CORBA service that provides support for fault-tolerance through the replication of CORBA objects. In this paper, we present several optimization techniques that are used to improve the performance of OGS. For e ...
In the framework of process optimization, measurements can be used to compensate for the effect of uncertainty. The method studied in this paper combines a process model and measurements to iteratively improve the operation of continuous processes. Unlike ...
This paper describes an analytical model developed to simulate and optimize an ultrasonic transducer to be used for spinal tissue ablation. Necessary elements for the construction of the transducer are described and then combined in a complete transducer m ...
The paper reviews different aspects of deposition, integration, and device fabrication of PbZrxTi1-xO3 (PZT) films for application in micromechanical systems. The deposition of such films and the principal processes for their integration onto silicon subst ...