Piezoelectric Pb(Zr-x,Ti1-x)O-3 thin film cantilever and bridge acoustic sensors for miniaturized photoacoustic gas detectors
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The piezoelectric properties of rhombohedral relaxor-ferroelectric compositions close to morphotropic phase boundary have been studied as a function of temperature. As they exhibit, upon heating, a rhombohedral to tetragonal phase transition the piezoelect ...
The switching, fatigue and rejuvenation phenomena of ferroelectric PZT thin films with differently processed electrode-PZT interfaces and of different thicknesses have been investigated. The ferroelectric contribution to the switching parameters has been i ...
The domain nucleation and growth during polarization switching in Pb(Zr,Ti)O-3 (PZT) ferroelectric thin film capacitors with Pt top (TE) and bottom electrodes (BE) were studied by means of atomic force microscopy (AFM). The experimental configuration used ...
A novel piezoelectric thin-film accelerometer has been designed and its performance has been analysed. The piezoelectric thin film (PZT for example) is delineated into an array of pads to reduce the sensor capacitance. By filling the cavity around the PZT ...
