Publication

Piezoelectric Pb(Zr-x,Ti1-x)O-3 thin film cantilever and bridge acoustic sensors for miniaturized photoacoustic gas detectors

Related publications (47)

About
Privacy
Disclaimer

Graph Chatbot

Chat with Graph Search

Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.

DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.

Piezoelectric Pb(Zr-x,Ti1-x)O-3 thin film cantilever and bridge acoustic sensors for miniaturized photoacoustic gas detectors

Graph Chatbot

Chat with Graph Search

Patterned and self-assembled ferroelectric nano-structures obtained by epitaxial growth and e-beam lithography

Piezoelectric thin films for bulk acoustic wave resonator applications

Piezoelectric acoustic sensors and ultrasonic transducers based on textured PZT thin films

Piezoelectric response of thin films determined by charge integration technique: Substrate bending effects

Polyimide membrane with ZnO piezoelectric thin film pressure transducers as a differential pressure liquid flow sensor

Size-effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature-size

Piezoelectric cantilever microphone for photoacoustic GAS detector

Downscaling of Pb(Zr,Ti)O-3 film thickness for low-voltage ferroelectric capacitors: Effect of charge relaxation at the interfaces

Ferroelectric thin films for micro-sensors and actuators: a review

Stoichiometry and interdiffusion in PZT thin films studied by transmission electron microscopy