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SU-8 nanocomposite coatings with improved tribological performance for MEMS
Related concepts (32)
Tribology
Whenever two objects rub together, for instance wheels on a road, gears in a motor, there is both friction and wear. Different surfaces have different amounts of friction, for instance a smooth surface compared to a rough one. How much material comes off also depends upon the surfaces, and also how much pressure is used -- for instance using sandpaper to smooth out wood. One can also add liquids such as oils or water to reduce the friction, which is called lubrication.
Friction
Friction is the force resisting the relative motion of solid surfaces, fluid layers, and material elements sliding against each other. There are several types of friction: Dry friction is a force that opposes the relative lateral motion of two solid surfaces in contact. Dry friction is subdivided into static friction ("stiction") between non-moving surfaces, and kinetic friction between moving surfaces. With the exception of atomic or molecular friction, dry friction generally arises from the interaction of surface features, known as asperities (see Figure 1).
Wear
Wear is the damaging, gradual removal or deformation of material at solid surfaces. Causes of wear can be mechanical (e.g., erosion) or chemical (e.g., corrosion). The study of wear and related processes is referred to as tribology. Wear in machine elements, together with other processes such as fatigue and creep, causes functional surfaces to degrade, eventually leading to material failure or loss of functionality. Thus, wear has large economic relevance as first outlined in the Jost Report.
Contact mechanics
Contact mechanics is the study of the deformation of solids that touch each other at one or more points. A central distinction in contact mechanics is between stresses acting perpendicular to the contacting bodies' surfaces (known as normal stress) and frictional stresses acting tangentially between the surfaces (shear stress). Normal contact mechanics or frictionless contact mechanics focuses on normal stresses caused by applied normal forces and by the adhesion present on surfaces in close contact, even if they are clean and dry.
Rolling resistance
Rolling resistance, sometimes called rolling friction or rolling drag, is the force resisting the motion when a body (such as a ball, tire, or wheel) rolls on a surface. It is mainly caused by non-elastic effects; that is, not all the energy needed for deformation (or movement) of the wheel, roadbed, etc., is recovered when the pressure is removed. Two forms of this are hysteresis losses (see below), and permanent (plastic) deformation of the object or the surface (e.g. soil).
Silver nanoparticle
Silver nanoparticles are nanoparticles of silver of between 1 nm and 100 nm in size. While frequently described as being 'silver' some are composed of a large percentage of silver oxide due to their large ratio of surface to bulk silver atoms. Numerous shapes of nanoparticles can be constructed depending on the application at hand. Commonly used silver nanoparticles are spherical, but diamond, octagonal, and thin sheets are also common. Their extremely large surface area permits the coordination of a vast number of ligands.
Nanoparticle
A nanoparticle or ultrafine particle is usually defined as a particle of matter that is between 1 and 100 nanometres (nm) in diameter. The term is sometimes used for larger particles, up to 500 nm, or fibers and tubes that are less than 100 nm in only two directions. At the lowest range, metal particles smaller than 1 nm are usually called atom clusters instead.
Heat treating
Heat treating (or heat treatment) is a group of industrial, thermal and metalworking processes used to alter the physical, and sometimes chemical, properties of a material. The most common application is metallurgical. Heat treatments are also used in the manufacture of many other materials, such as glass. Heat treatment involves the use of heating or chilling, normally to extreme temperatures, to achieve the desired result such as hardening or softening of a material.
Photoresist
A photoresist (also known simply as a resist) is a light-sensitive material used in several processes, such as photolithography and photoengraving, to form a patterned coating on a surface. This process is crucial in the electronics industry. The process begins by coating a substrate with a light-sensitive organic material. A patterned mask is then applied to the surface to block light, so that only unmasked regions of the material will be exposed to light. A solvent, called a developer, is then applied to the surface.
Thin film
A thin film is a layer of material ranging from fractions of a nanometer (monolayer) to several micrometers in thickness. The controlled synthesis of materials as thin films (a process referred to as deposition) is a fundamental step in many applications. A familiar example is the household mirror, which typically has a thin metal coating on the back of a sheet of glass to form a reflective interface. The process of silvering was once commonly used to produce mirrors, while more recently the metal layer is deposited using techniques such as sputtering.