Cleanrooms Plateform

The Platform of the White Rooms at EPFL offers extensive facilities for micro- and nano-fabrication and characterization, including specialized III V lab clean rooms, thin films deposition, dry etching, lithography, electron and atomic force microscopy. These facilities are open for use by interested researchers from other Institutes at EPFL. To access the clean room, researchers must have passed the CMi introduction course and submit a training request with their process flow. The clean room is located in zones 50, 51, and 52 of the PH Building. The platform also provides equipment such as SEM, photolithography tools, dry etching machines, thin films deposition systems, and various metrology equipment for research purposes.