Laboratory of Microsystems 1

The Laboratory of Microsystems 1 (LMIS1) at EPFL focuses on Microsystems (MEMS), Materials Science, and Nanotechnology to tackle engineering challenges at the mesoscopic scale. They conduct research on innovative detection methods and microdevices for nuclear magnetic resonance (NMR), electron spin resonance (ESR), and ferromagnetic resonance (FMR) spectroscopy and imaging. Additionally, they explore tomographic microscopy of polymer-derived SiCN functional ceramics. LMIS1 is actively involved in rapid prototyping of micro and nanostructures using novel patterning methods like thermal scanning probe lithography, stencil lithography, and inkjet printing. They are also engaged in the development of wearable and implantable devices, as well as ceramic MEMS. The laboratory's research extends to the micro and nanostructuring of functional materials, such as polymer and bio-materials, and scalable micro-nanomanufacturing.